公开(公告)号：US20040099816A1

公开(公告)日：2004-05-27

申请号：US10300898

申请日：2002-11-21

Applicant: ASML U.S. LLC

Inventor： Stephen Roux

IPC: H01J061/12

CPC classification number: G03F7/70908 ,  G03F7/70858 ,  G03F7/70916

Abstract: A system and method are used to isolate a first gas from a second gas using a third gas. A first chamber includes an element that emits light based on a first gas. A second chamber uses the emitted light to perform a process and includes the second gas. A gaslock that couples the first chamber to the second chamber. A gas source supplies a third gas between the first and the second gas in the gaslock, such that the first gas is isolated from the second gas in the gaslock. The first and third gas can be pumped from the first chamber and separated from one another, such that the first gas can be recycled for reuse to form the emitting light.

Abstract translation: 使用系统和方法使用第三气体将第一气体与第二气体隔离。 第一室包括基于第一气体发光的元件。 第二室使用发射的光进行处理并且包括第二气体。 将第一室耦合到第二室的气闸。 气体源在气闸中的第一和第二气体之间提供第三气体，使得第一气体与气闸中的第二气体隔离。 第一和第三气体可以从第一室泵送并彼此分离，使得第一气体可以被再循环以重新使用以形成发射光。

公开(公告)号：US20030052610A1

公开(公告)日：2003-03-20

申请号：US10246420

申请日：2002-09-19

Applicant: KOITO MANUFACTURING CO., LTD.

Inventor： Michio Takagaki ,  Masaya Shido ,  Shinichi Irisawa ,  Takeshi Fukuyo

IPC: H01J017/20 ,  H01J061/12

CPC classification number: H01J61/827 ,  H01J61/125

Abstract: A mercury-free arc tube includes a closed glass bulb held between pinch seal portions located at opposite ends of the close glass bulb; and a pair of electrodes provided in the closed glass bulb so as to be opposite to each other. The closed glass bulb does not contain mercury but contains main light emitting metal halide (NaI and ScI3). A rare gas is enclosed in the closed glass bulb with a charged pressure set to be in a range of from 8 to 20 atmospheres. If necessary, a predetermined buffer metal halide acting as a buffer substance is enclosed in the closed glass bulb. The charged pressure of the rare gas is higher than the conventional charged pressure (6 atmospheres).

Abstract translation: 无汞电弧管包括封闭的玻璃灯泡，其保持在位于关闭玻璃灯泡的相对端的收缩密封部分之间; 以及设置在封闭玻璃灯泡中以使得彼此相对的一对电极。 封闭的玻璃灯泡不含汞，但含有主要的发光金属卤化物（NaI和ScI3）。 在封闭的玻璃灯泡中封闭一种稀有气体，其充电压力设定在8至20个大气压的范围内。 如果需要，用作缓冲物质的预定的缓冲金属卤化物被封闭在封闭的玻壳中。 稀有气体的充电压力高于常规的充电压力（6个大气压）。

公开(公告)号：US20020008471A1

公开(公告)日：2002-01-24

申请号：US09878941

申请日：2001-06-13

Applicant: KOITO MANUFACTURING CO., LTD.

Inventor： Takeshi Fukuyo ,  Shinichi Irisawa ,  Yoshitaka Ohshima

IPC: H01J061/12

CPC classification number: H01J61/34 ,  H01J9/395 ,  H01J61/12

Abstract: A discharge bulb including: an arc tube having a light emitting portion constructed in a manner that a light emitting substance is enclosed therein by pinch-sealing the arc tube, and discharge electrodes are oppositely arranged therein; and a shroud glass tube hermetically sealing and covering the arc tube, so as to form a space between the shroud glass tube and the arc tube. And a water content or pressure of gas enclosed in the sealed space is specified.

Abstract translation: 一种放电灯泡，包括：具有发光部分的发光管，该发光部分以通过夹紧电弧管将发光物质包围在其中的方式构成，并且放电电极相对布置在其中; 和一个护罩玻璃管，密封和覆盖电弧管，以在护罩玻璃管和电弧管之间形成一个空间。 并规定了封闭在密封空间内的气体的含水量或气体压力。

公开(公告)号：US20010011873A1

公开(公告)日：2001-08-09

申请号：US09765006

申请日：2001-01-18

Inventor： Toru Kimura

IPC: H01J017/20 ,  H01J061/12

CPC classification number: H01J9/40 ,  H01J61/72

Abstract: A neon lamp including a sealed glass bulb, electrodes and leads connected to the electrodes has a flat head whose center region descends into the interior of the sealed glass bulb. A method of producing the neon lamp includes steps of charging neon gas into a glass tube through a fine glass tube at the head of the glass tube, sealing the fine glass tube to obtain a sealed glass bulb having a projecting tip portion, removing excess glass of the projecting tip portion, and shaping the projecting tip portion into a substantially flat or lenticular head portion. A system for producing the neon lamp includes a shaping head for accommodating the sealed glass bulb with its projecting tip portion exposed outside the shaping head, heating means for melting the projecting tip portion, a projecting tip cutter for removing excess glass of the projecting tip portion, and a head presser for shaping the projecting tip portion into a substantially flat or lenticular shape.

Abstract translation: 包括密封玻璃灯泡，连接到电极的电极和引线的氖灯具有中心区域下降到密封玻璃灯泡内部的平头。 制造氖灯的方法包括以下步骤：通过玻璃管头部的细玻璃管将氖气充入玻璃管中，密封微细玻璃管，获得具有突出尖端部分的密封玻璃泡，除去多余的玻璃 并且将突出的尖端部分成形为基本上平坦或透镜的头部部分。 一种用于制造霓虹灯的系统包括：成形头，用于容纳密封的玻璃灯泡，其突出的尖端部分暴露在成型头的外部;加热装置，用于熔化突出的尖端部分;突出的尖端切割器，用于去除突出的尖端部分的多余玻璃 ，以及用于将突出的尖端部分成形为基本平坦或透镜形状的头部压头。

公开(公告)号：US20040183446A1

公开(公告)日：2004-09-23

申请号：US10798848

申请日：2004-03-12

Applicant: PATENT-TREUHAND-GESELLSCHAFT FUR ELEKTRISCHE GLUHLAMPEN mbH

Inventor： Dirk Grundmann ,  Conrad Schimke

IPC: H01J061/18 ,  H01J017/20 ,  H01J061/12

CPC classification number: H01J61/827 ,  H01J61/125

Abstract: The invention relates to a mercury-free high-pressure discharge lamp for use in a vehicle headlight. The ionizable filling of the high-pressure discharge lamp according to the invention comprises exclusively xenon and the halides of the metals sodium, scandium, indium and zinc.

Abstract translation: 本发明涉及一种用于车头灯的无汞高压放电灯。 根据本发明的高压放电灯的可电离填充物仅包括氙和金属钠，钪，铟和锌的卤化物。

公开(公告)号：US20030160565A1

公开(公告)日：2003-08-28

申请号：US09782204

申请日：2001-02-14

Inventor： Steven C. Hansen

IPC: H01J017/24 ,  H01J061/12

CPC classification number: H01K1/50 ,  H01K1/52 ,  Y02B20/12

Abstract: A pelletized lamp fill material suitable for delivering a precise quantity of rhenium and a halogen into the light emitting chamber of a tungsten halogen lamp. The pellet is formed by pressure aggregating a mixture of a metal powder and a rhenium-halogen compound. In a pellet suitable for delivering bromine into the lamp, the metal powder may be mixed with rhenium tribromide powder to form the pellet. The release of the bromine and rhenium is desirably controlled over time as a function of temperature.

Abstract translation: 适合于将精确量的铼和卤素输送到卤钨灯的发光室中的颗粒状灯填充材料。 颗粒通过压力聚集金属粉末和铼 - 卤素化合物的混合物形成。 在适于将溴输送到灯中的颗粒中，金属粉末可以与三溴化铼粉末混合以形成颗粒。 随着时间的推移，溴和铼的释放期望作为温度的函数来控制。

公开(公告)号：US20030146398A1

公开(公告)日：2003-08-07

申请号：US10357173

申请日：2003-02-03

Applicant: XTREME technologies GmbH

Inventor： Guido Schriever

IPC: H01J061/12

CPC classification number: H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  H05G2/005

Abstract: The invention is directed to a method for generating extreme ultraviolet (EUV) radiation based on a radiation-emitting plasma, particularly for generating EUV radiation with a wavelength around 13 nm. The object of the invention, to find a novel possibility for generating extreme ultraviolet radiation based on a radiation-emitting plasma in which the emission output of the EUV source is increased to the wavelength range above the L-absorption edge of silicon without substantially increasing the technical and monetary expenditure for plasma generation, is met in a method for generating extreme ultraviolet radiation through emission of broadband radiation from a plasma under vacuum conditions in that the plasma is generated using at least one element from V to VII in the p-block of the fifth period of the periodic table of elements. Iodine, tellurium, antimony or materials containing these elements or chemical compounds formed with these elements are preferably used. The invention is advantageously applied in EUV lithography for semiconductor chip fabrication.

Abstract translation: 本发明涉及一种用于产生基于辐射发射等离子体的特别用于产生波长约13nm的EUV辐射的极紫外（EUV）辐射的方法。 本发明的目的是为了发现基于发射等离子体产生极紫外辐射的新颖可能性，其中EUV源的发射输出增加到高于硅的L-吸收边缘的波长范围，而基本上不增加 用于通过在真空条件下从等离子体发射宽带辐射而产生极紫外辐射的方法满足等离子体产生的技术和货币支出，因为等离子体是通过使用至少一个元素从V至VII生成在p块 元素周期表的第五个周期。 优选使用碘，碲，锑或含有这些元素的材料或由这些元素形成的化合物。 本发明有利地应用于用于半导体芯片制造的EUV光刻中。

公开(公告)号：US20030137247A1

公开(公告)日：2003-07-24

申请号：US10182174

申请日：2002-10-09

Inventor： Hiroyuki Kado ,  Kanako Miyashita

IPC: H01J017/20 ,  H01J061/12

CPC classification number: H01J9/395 ,  H01J9/261 ,  H01J11/12 ,  H01J11/48 ,  H01J11/50 ,  H01J61/16 ,  H01J61/305 ,  H01J65/04

Abstract: A discharge light-emitting device includes a gas-filled discharge spaces (30) to use electric discharge in the gas. The gas contains at least 0.01-1% water vapor by volume. The specified amount of water vapor decreases discharge voltage markedly. Water vapor is introduced between a sealing step and an evacuation step so that the gas-filled discharge spaces can finally contain a desired amount of water vapor.

Abstract translation: 放电发光装置包括在气体中使用放电的充气放电空间（30）。 气体含有至少0.01-1％的水蒸汽。 指定量的水蒸汽显着降低了放电电压。 在密封步骤和排气步骤之间引入水蒸汽，使得气体填充的排放空间可以最终含有所需量的水蒸汽。

公开(公告)号：US20020195943A1

公开(公告)日：2002-12-26

申请号：US10112024

申请日：2002-04-01

Inventor： Matthew Eric Krisl ,  Abbas Lamouri ,  Leonid Pekker ,  Paul Morand ,  Juris Sulcs ,  Norman L. Boling

IPC: H01J017/20 ,  H01J061/12

CPC classification number: H01J61/35 ,  H01J9/20 ,  H01J9/247 ,  H01J61/40 ,  H01J61/827

Abstract: An apparatus and method for achieving desired spectral emission characteristics in plasma lamps is disclosed. The apparatus and method use multi-layer thin film optical interference coatings to selectively reflect a portion of the light such that it can be absorbed in the plasma. The multi-layer thin film coating is applied to any surface of the lamp, which substantially surrounds the plasma. The number and thickness of the layers in the coating are selected to ensure that a significant portion of the selected light emitted from the plasma is reflected by the coating and absorbed by the plasma. The properties of the coating, reflectance, transmittance and absorption are determined as a function of plasma and lamp characteristics. These characteristics include the spectral emission characteristics of the plasma, the spectral absorption characteristics of the plasma, the physical dimensions of the plasma, the angular distribution of the light emitted from the plasma on the coating and the geometry of the coated surface.

Abstract translation: 公开了一种在等离子体灯中实现期望的光谱发射特性的装置和方法。 该装置和方法使用多层薄膜光学干涉涂层来选择性地反射光的一部分，使其能够被吸收在等离子体中。 将多层薄膜涂层施加到基本上围绕等离子体的灯的任何表面上。 选择涂层中层数和厚度以确保从等离子体发射的所选择的光的大部分被涂层反射并被等离子体吸收。 涂层的性质，反射率，透射率和吸收值是等离子体和灯泡特性的函数。 这些特征包括等离子体的光谱发射特性，等离子体的光谱吸收特性，等离子体的物理尺寸，从等离子体在涂层上发射的光的角分布和涂覆表面的几何形状。

公开(公告)号：US20020180352A1

公开(公告)日：2002-12-05

申请号：US09867205

申请日：2001-05-29

Applicant: GE Hungary

Inventor： Laszlo Ilyes ,  Jozsef Tokes ,  Jozsef Fulop

IPC: H01J017/20 ,  H01J061/12

CPC classification number: H01J61/33 ,  H01J61/72

Abstract: A low-pressure discharge lamp with a double spiral shaped discharge tube including two spiral shaped tube portions. The tube portions define a central axis of the discharge tube. A cold chamber portion connects the ends of the spiral shaped tube portions. The cold chamber portion has a first transversal dimension substantially perpendicular to the central axis which is larger than the diameter of the tube portions. The cold chamber portion further has a second transversal dimension substantially parallel to the central axis. The second transversal dimension of the cold chamber portion substantially corresponds to the diameter of the tube portions.

Abstract translation: 一种具有双螺旋形放电管的低压放电灯，包括两个螺旋形管部分。 管部分限定放电管的中心轴线。 冷室部分连接螺旋形管部分的端部。 冷室部分具有基本上垂直于中心轴线的第一横向尺寸，其大于管部分的直径。 冷室部分还具有基本上平行于中心轴线的第二横向尺寸。 冷室部分的第二横向尺寸基本上对应于管部分的直径。