公开(公告)号：US20040079902A1

公开(公告)日：2004-04-29

申请号：US10284022

申请日：2002-10-29

Inventor： Robert Bristol

IPC: H01J063/00 ,  G01J003/18

CPC classification number: G03F7/70033 ,  G03F7/70916 ,  G03F7/70958

Abstract: Apparatus comprising a plasma source to generate a spectrum of radiation that includes extreme ultraviolet radiation, a reflector to generate a beam of extreme ultraviolet radiation from the spectrum of radiation, and a thin film to pass at least a portion of the extreme ultraviolet radiation.

Abstract translation: 包括用于产生包括极紫外线辐射的辐射光谱的等离子体源的装置，用于从辐射谱产生极紫外辐射束的反射器以及通过至少一部分极紫外辐射的薄膜的装置。