Emissive filament and support structure
    1.
    发明授权
    Emissive filament and support structure 失效
    发光灯丝和支撑结构

    公开(公告)号:US06259193B1

    公开(公告)日:2001-07-10

    申请号:US09093046

    申请日:1998-06-08

    CPC classification number: H01K7/02 H01J1/18 H01J9/04 H01K1/14

    Abstract: A filament comprises a generally thin metal component, such as a sheet, ribbon, or foil. The filament comprises at least one emitter, at least one current-condensing structure and a tab on each end of the at least one emitter. Each tab is connectable to a support system, comprising for example a lead and attachment post. When a current is passed through the filament, the current-condensing structure establishes current flow through the filament resulting in a desired temperature distribution across the emitter, for example a substantially uniform temperature distribution. A predictive tool for determining a geometry of a filament to provide a desired temperature distribution is set forth. The filament may be curved, and methods and systems for providing a curved filament are also provided. Attachment systems are further disclosed for attaching an emitter to a support structure.

    Abstract translation: 长丝包括通常薄的金属部件,例如片,带或箔。 灯丝包括至少一个发射器,至少一个电流冷凝结构和至少一个发射器的每个端部上的突出部。 每个标签可连接到支撑系统,包括例如引线和附接柱。 当电流通过灯丝时,电流冷凝结构建立通过灯丝的电流,导致跨过发射器的所需温度分布,例如基本均匀的温度分布。 阐述了用于确定细丝几何形状以提供所需温度分布的预测工具。 丝可以是弯曲的,并且还提供了用于提供弯曲细丝的方法和系统。 进一步公开了用于将发射器附接到支撑结构的附接系统。

    Electron gun and electron beam exposure device
    2.
    发明授权
    Electron gun and electron beam exposure device 失效
    电子枪和电子束曝光装置

    公开(公告)号:US06707240B1

    公开(公告)日:2004-03-16

    申请号:US09890959

    申请日:2001-09-28

    CPC classification number: H01J3/024 H01J37/075 H01J2237/3175

    Abstract: An electron gun includes a plate-like main cathode 77 having an electron emitting surface 79 and a sub-cathode 81 provided toward the rear surface of the main cathode to heat the main cathode 77 by imparting an electron bombardment. The sub-cathode 81 is constituted of filaments 83 and 85 coiled in a double helix structure and the diameter of the sub-cathode 81 is larger than the diameter of the main cathode 77. As a result, the temperature at the peripheral area of the electron emitting surface 79 can be set higher than the temperature at the center, to achieve an electron beam with a uniform intensity distribution.

    Abstract translation: 电子枪包括具有电子发射表面79的板状主阴极77和朝向主阴极的后表面设置的副阴极81,以通过施加电子轰击来加热主阴极77。 副阴极81由以双螺旋结构卷绕的细丝83和85构成,并且副阴极81的直径大于主阴极77的直径。因此, 电子发射表面79可以被设置为高于中心处的温度,以实现具有均匀强度分布的电子束。

    Stress relieved filament support assembly
    3.
    发明授权
    Stress relieved filament support assembly 失效
    应力消除灯丝支撑组件

    公开(公告)号:US06191527B1

    公开(公告)日:2001-02-20

    申请号:US09293745

    申请日:1999-04-16

    CPC classification number: H01J23/05

    Abstract: The structure is an improvement to prevent thermal cycle damage to a braze joint in a magnetron filament assembly. The filament is welded to a molybdenum filament weld ring which, in turn, is brazed to a solid iron filament support cylinder. This braze joint is sometimes broken because of the different thermal expansion coefficients of molybdenum and iron, even though slots are formed in the molybdenum cylinder to reduce the stress. The improvement is the addition of a thin yieldable cylinder along the top outer edge of the iron support cylinder to which the molybdenum cylinder is brazed. This thin cylinder can be constructed by cutting an annular groove adjacent to the top outer edge of the iron support cylinder. The groove then forms the cylinder to which the weld ring is attached, and the thin iron cylinder yields with thermal stress and therefore relieves the stress on the adjacent braze joint.

    Abstract translation: 该结构是防止磁控管丝组件中的钎焊接头的热循环损坏的改进。 灯丝被焊接到钼丝焊接环,钼丝焊接环又被钎焊到固体铁丝支撑筒上。 由于钼和铁的热膨胀系数不同,这种钎焊接头有时被破坏,尽管在钼圆柱中形成槽以减少应力。 改进之处在于,沿着铁支撑筒的顶部外边缘添加薄的可收缩圆柱体,钼圆柱体被钎焊到该圆柱体上。 该细圆柱体可以通过切割与铁支撑筒的顶部外边缘相邻的环形槽来构造。 然后,凹槽形成焊接环所附着的圆筒,并且薄铁圆筒产生热应力,从而减轻相邻钎焊接头上的应力。

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