公开(公告)号：US12106928B2

公开(公告)日：2024-10-01

申请号：US17938466

申请日：2022-10-06

Applicant: NuFlare Technology, Inc.

Inventor： Ryoei Kobayashi

IPC: H01J37/065 ,  H01J9/04 ,  H01J9/18 ,  H01J37/075 ,  H01J37/317

CPC classification number: H01J37/065 ,  H01J9/04 ,  H01J9/18 ,  H01J37/075 ,  H01J37/3177 ,  H01J2237/032

Abstract: A cathode mechanism of an electron emission source includes a crystal that includes an upper part being columnar, truncated conical, or their combined shape, and having a first surface to emit thermoelectrons, and a lower part, integrated with the upper part, having a second surface substantially parallel to the first surface, and a diameter larger than the maximum diameter of the upper part, a holding part that is a column having, in order from the holding part upper side, different inner diameters of a first diameter and a second diameter larger than the first one, and that holds the crystal in the state where the crystal first surface is projecting from the upper surface, and the crystal second surface contacts the holding part inside the column, and a retaining part that retains the crystal, at the back of the crystal lower part, not to be separated from the holding part.

公开(公告)号：US20160005567A1

公开(公告)日：2016-01-07

申请号：US14851692

申请日：2015-09-11

Applicant: Lawrence Livermore National Security, LLC

Inventor： Bryan W. REED ,  William J. DEHOPE ,  Glenn HUETE ,  Thomas B. LAGRANGE ,  Richard M. SHUTTLESWORTH

IPC: H01J37/075 ,  H01J37/26 ,  H01J37/147

CPC classification number: H01J37/075 ,  H01J37/1472 ,  H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/15 ,  H01J2237/151 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2449 ,  H01J2237/24495

Abstract: An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses of a predefined pulse duration and waveform, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has two pairs of plates arranged perpendicular to one another. A control system controls the laser and a plurality of switching components synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to be provided with an independently set duration and independently set inter-pulse spacings.

Abstract translation: 公开了一种具有激光驱动光电阴极和任意波形发生器（AWG）激光系统（“激光”）的电子显微镜。 激光器产生预定脉冲持续时间和波形的时间上形状的激光脉冲串，并将激光脉冲引导到激光驱动的光电阴极以产生一系列电子脉冲。 图像传感器与偏转器子系统一起使用。 偏转器子系统布置在目标的下游，但是在图像传感器的上游，并且具有彼此垂直布置的两对板。 控制系统控制激光器和与激光器同步的多个切换部件，以独立地控制每个偏转板的激励。 这允许每个电子脉冲被引导到图像传感器的不同部分，并且被提供有独立设置的持续时间并且独立设置脉冲间隔。

公开(公告)号：US20150235800A1

公开(公告)日：2015-08-20

申请号：US14181321

申请日：2014-02-14

Applicant: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC

Inventor： Bryan W. REED ,  William J. DEHOPE ,  Glenn HUETE ,  Thomas B. LAGRANGE ,  Richard M. SHUTTLESWORTH

IPC: H01J37/075 ,  H01J37/147 ,  H01J37/26

CPC classification number: H01J37/075 ,  H01J37/1472 ,  H01J37/22 ,  H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/15 ,  H01J2237/151 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2449 ,  H01J2237/24495

Abstract: An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses of a predefined pulse duration and waveform, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has two pairs of plates arranged perpendicular to one another. A control system controls the laser and a plurality of switching components synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to be provided with an independently set duration and independently set inter-pulse spacings.

Abstract translation: 公开了一种具有激光驱动光电阴极和任意波形发生器（AWG）激光系统（“激光”）的电子显微镜。 激光器产生预定的脉冲持续时间和波形的时间激光脉冲串，并将激光脉冲引导到激光驱动的光电阴极以产生一系列电子脉冲。 图像传感器与偏转器子系统一起使用。 偏转器子系统布置在目标的下游，但是在图像传感器的上游，并且具有彼此垂直布置的两对板。 控制系统控制激光器和与激光器同步的多个切换部件，以独立地控制每个偏转板的激励。 这允许每个电子脉冲被引导到图像传感器的不同部分，并且被提供有独立设置的持续时间并且独立设置脉冲间隔。

公开(公告)号：US20150187541A1

公开(公告)日：2015-07-02

申请号：US14578525

申请日：2014-12-22

Applicant: MAPPER LITHOGRAPHY IP B.V

Inventor： Laura DINU-GÜRTLER ,  Eric Petrus HOGERVORST

IPC: H01J37/317 ,  H01J1/15 ,  H01J37/075

CPC classification number: H01J37/3174 ,  G03F7/70058 ,  H01J1/15 ,  H01J1/28 ,  H01J3/027 ,  H01J3/029 ,  H01J37/075 ,  H01J37/3177 ,  H01J2229/481 ,  H01J2237/061

Abstract: The invention relates to a cathode arrangement comprising: a thermionic cathode comprising an emission portion provided with an emission surface for emitting electrons, and a reservoir for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; a focusing electrode comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and an adjustable heat source configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

Abstract translation: 本发明涉及一种阴极装置，其包括：热离子阴极，其包括具有用于发射电子的发射表面的发射部分和用于保持材料的储存器，其中所述材料在被加热时释放向发射扩散的功函数降低颗粒 以第一蒸发速率发射在发射表面; 聚焦电极，其包括用于聚焦从阴极的发射表面发射的电子的聚焦表面; 以及可调节热源，其被配置为将聚焦表面保持在防止在聚焦表面上降低颗粒的功函数积累的温度。

公开(公告)号：US08946629B2

公开(公告)日：2015-02-03

申请号：US14258607

申请日：2014-04-22

Applicant: Ebara Corporation

Inventor： Masahiro Hatakeyama ,  Yasushi Toma ,  Shoji Yoshikawa ,  Kiwamu Tsukamoto

IPC: G01N23/00 ,  G21K7/00 ,  H01J37/28

CPC classification number: H01J37/22 ,  G01N23/2251 ,  G01N2223/204 ,  G01N2223/611 ,  H01J3/024 ,  H01J37/075 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/2448 ,  H01J2237/2806

Abstract: An inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The primary optical system includes a photoelectron generator having a photoelectronic surface. The base material of the photoelectronic surface is made of material having a higher thermal conductivity than the thermal conductivity of quartz.

Abstract translation: 检查装置包括：用于产生任何带电粒子和电磁波作为光束的光束产生装置; 主光学系统，其将光束引导到保持在工作室中的检查对象中，并用该光束照射检查对象; 第二光学系统，其检测从检查对象发生的次级带电粒子; 以及基于检测到的二次带电粒子形成图像的图像处理系统。 主光学系统包括具有光电子表面的光电子发生器。 光电子表面的基材由具有比石英热导率更高的导热性的材料制成。

公开(公告)号：US07601972B2

公开(公告)日：2009-10-13

申请号：US11907097

申请日：2007-10-09

Applicant: Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Toshifumi Kimba ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Tsutomu Karimata ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima ,  Toru Takagi

Inventor： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Toshifumi Kimba ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Tsutomu Karimata ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima ,  Toru Takagi

IPC: H01J37/18

CPC classification number: G03F7/70616 ,  G01N23/225 ,  H01J37/05 ,  H01J37/06 ,  H01J37/073 ,  H01J37/075 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/226 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0435 ,  H01J2237/057 ,  H01J2237/06316 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24564 ,  H01J2237/248 ,  H01J2237/2482 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817

Abstract: An inspection apparatus and a semiconductor device manufacturing method using the same. The inspection apparatus is used for defect inspection, line width measurement, surface potential measurement or the like of a sample such as a wafer. In the inspection apparatus, a plurality of charged particles is delivered from a primary optical system to the sample, and secondary charged particles emitted from the sample are separated from the primary optical system and introduced through a secondary optical system to a detector. Irradiation of the charged particles is conducted while moving the sample. Irradiation spots of the charged particles are arranged by N rows along a moving direction of the sample and by M columns along a direction perpendicular thereto. Every row of the irradiation spots of the charged particles is shifted successively by a predetermined amount in a direction perpendicular to the moving direction of the sample.

公开(公告)号：US20090026912A1

公开(公告)日：2009-01-29

申请号：US11829034

申请日：2007-07-26

Applicant: Vincenzo Lordi ,  Kirkwood Rough ,  Xuefeng Liu ,  Shem-Tov Levi

Inventor： Vincenzo Lordi ,  Kirkwood Rough ,  Xuefeng Liu ,  Shem-Tov Levi

IPC: H01J37/302 ,  H01J29/51 ,  H01J37/30

CPC classification number: H01J37/063 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/073 ,  H01J37/075 ,  H01J37/3174 ,  H01J2237/0432

Abstract: Method and apparatus for achieving an intensity modulated electron blanker are disclosed. An apparatus includes a cathode exposed to an activation source to generate an electron beam. Cathode control circuitry adjusts a cathode control amplifier to regulate cathode voltage and the potential of the electron beam. In some approaches the electron beam potential is used to control the blanking frequency, switching speeds, and duty cycle. In another approach electron generating beams directed on to the cathode are modulated to control the electron beam.

Abstract translation: 公开了用于实现强度调制的电子消除器的方法和装置。 一种装置包括暴露于激活源的阴极以产生电子束。 阴极控制电路调节阴极控制放大器以调节阴极电压和电子束的电位。 在一些方法中，电子束电位用于控制消隐频率，开关速度和占空比。 在另一种方法中，调节指向阴极的电子产生光束以控制电子束。

公开(公告)号：US4803398A

公开(公告)日：1989-02-07

申请号：US881709

申请日：1986-07-03

Applicant: Reinhardt Kraft ,  Horst Ranke

Inventor： Reinhardt Kraft ,  Horst Ranke

IPC: C23C14/30 ,  H01J1/20 ,  H01J3/02 ,  H01J37/06 ,  H01J37/075

CPC classification number: H01J37/075 ,  H01J3/027

Abstract: An electron gun with one directly heatable initial cathode (2), one indirectly heatable second blocking cathode (3) and one focusing electrode (17). The focusing electrode (17) presents an initial centering region (18) and, by means of supporting braces, the blocking cathode (3) is fixed concentrically in a carrier ring (19) presenting a second centering region complementary to the first centering region (18). This permits the blocking cathode (3) to be introduced into the focusing electrode from the back by means of the carrier ring (19), and the carrier ring (19) is secured by means of a locking ring (24).

Abstract translation: 具有一个可直接加热的初始阴极（2），一个间接可加热的第二阻挡阴极（3）和一个聚焦电极（17）的电子枪。 聚焦电极（17）呈现初始定心区域（18），并且通过支撑撑杆将阻挡阴极（3）同心地固定在载体环（19）中，所述载体环（19）具有与第一定心区域互补的第二定心区域 18）。 这允许阻挡阴极（3）通过承载环（19）从背面引入聚焦电极，并且承载环（19）通过锁定环（24）固定。

公开(公告)号：US11978609B2

公开(公告)日：2024-05-07

申请号：US17595599

申请日：2019-05-21

Applicant: Hitachi High-Tech Corporation

Inventor： Minoru Kaneda

IPC: H01J37/09 ,  H01J37/073 ,  H01J37/075 ,  H01J37/28

CPC classification number: H01J37/09 ,  H01J37/073 ,  H01J37/075 ,  H01J37/28 ,  H01J2237/06316

Abstract: An electron gun EG in which mixing of secondary electrons is suppressed is provided. The electron gun EG has an electron source 1, an extraction electrode 2 for extracting an electron beam E1 from the electron source 1, and an acceleration electrode for accelerating the extracted electron beam E1. The extraction electrode 2 includes a diaphragm 4 for allowing a part of the electron beam E1 to pass through, a shield 5 positioned above the diaphragm 4 apart from the diaphragm 4, and a shield 6 positioned below the diaphragm 4 apart from the diaphragm 4. The diaphragm 4 has an opening OP4 having an opening diameter D4, the shield 5 has an opening OP5 having an opening diameter D5 which is greater than the opening diameter D4, and the shield 6 has an opening OP6 having an opening diameter D6 which is greater than the opening diameter D4.

公开(公告)号：US11901154B1

公开(公告)日：2024-02-13

申请号：US18178249

申请日：2023-03-03

Applicant: NuFlare Technology, Inc. ,  NuFlare Technology America, Inc.

Inventor： Victor Katsap

IPC: H01J1/15 ,  H01J37/065 ,  H01J37/075

CPC classification number: H01J37/065 ,  H01J37/075

Abstract: An electron emission cathode which includes a base, a heater connected to the base, an electron emitter connected to the heater at a mounting location distal to the base, and a conical heat shield surrounding a portion of the heater, having a truncated cone shape comprising a narrow end oriented toward the base and a wide end oriented toward the electron emitter. The conical heat shield is configured to reflect heat radiated by the heater toward the electron emitter. The conical heat shield reduces an overheating required to bring the electron emitter to an emission temperature and reduces a heating power required to operate the cathode.