公开(公告)号：US06410923B1

公开(公告)日：2002-06-25

申请号：US09550945

申请日：2000-04-17

Applicant: Albert V. Crewe

Inventor： Albert V. Crewe

IPC: H01J37143

CPC classification number: H01J37/1416 ,  H01J2237/1035 ,  H01J2237/28

Abstract: Disclosed are lens apparatus in which a beam of charged particles is brought to a focus by means of a magnetic field, the lens being situated behind the target position. In illustrative embodiments, a lens apparatus is employed in a scanning electron microscope as the sole lens for high-resolution focusing of an electron beam, and in particular, an electron beam having an accelerating voltage of from about 10 to about 30,000 V. In one embodiment, the lens apparatus comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. In other embodiments, the lens apparatus comprises a magnetic dipole or virtual magnetic monopole fabricated from a variety of materials, including permanent magnets, superconducting coils, and magnetizable spheres and needles contained within an energy-conducting coil. Multiple-array lens apparatus are also disclosed for simultaneous and/or consecutive imaging of multiple images on single or multiple specimens. The invention further provides apparatus, methods, and devices useful in focusing charged particle beams for lithographic processes.

Abstract translation: 公开了透镜装置，其中通过磁场使带电粒子束聚焦，透镜位于目标位置之后。 在示例性实施例中，在扫描电子显微镜中采用透镜装置作为用于电子束的高分辨率聚焦的唯一透镜，特别是具有约10至约30,000V的加速电压的电子束。在一个 透镜设备包括围绕光束的轴线布置的导电线圈和至少在由线圈包围的空间内沿着光束的轴线延伸的磁极片。 在其他实施例中，透镜装置包括由各种材料制成的磁偶极子或虚拟磁单极子，包括永磁体，超导线圈和可磁化球体以及包含在能量传导线圈内的针。 还公开了多阵列透镜装置，用于在单个或多个标本上同时和/或连续成像多个图像。 本发明还提供了用于聚焦用于光刻工艺的带电粒子束的装置，方法和装置。