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公开(公告)号：US09859097B2
公开(公告)日：2018-01-02
申请号：US15224167
申请日：2016-07-29
Inventor： R. Fabian W. Pease , Manu Prakash , James Stanley Cybulski , Alireza Nojeh
CPC classification number: H01J37/28 , H01J37/065 , H01J37/073 , H01J37/075 , H01J37/141 , H01J37/20 , H01J37/26 , H01J2237/061 , H01J2237/06308 , H01J2237/06333 , H01J2237/1035 , H01J2237/14 , H01J2237/164 , H01J2237/18 , H01J2237/20228 , H01J2237/2608 , H01J2237/262 , H01J2237/28 , H01J2237/2803
Abstract: A permanently sealed vacuum tube is used to provide the electrons for an electron microscope. This advantageously allows use of low vacuum at the sample, which greatly simplifies the overall design of the system. There are two main variations. In the first variation, imaging is provided by mechanically scanning the sample. In the second variation, imaging is provided by point projection. In both cases, the electron beam is fixed and does not need to be scanned during operation of the microscope. This also greatly simplifies the overall system.
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公开(公告)号：US20170062179A1
公开(公告)日：2017-03-02
申请号：US15224167
申请日：2016-07-29
Inventor： R. Fabian W. Pease , Manu Prakash , James Stanley Cybulski
IPC: H01J37/28
CPC classification number: H01J37/28 , H01J37/065 , H01J37/073 , H01J37/075 , H01J37/141 , H01J37/20 , H01J37/26 , H01J2237/061 , H01J2237/06308 , H01J2237/06333 , H01J2237/1035 , H01J2237/14 , H01J2237/164 , H01J2237/18 , H01J2237/20228 , H01J2237/2608 , H01J2237/262 , H01J2237/28 , H01J2237/2803
Abstract: A permanently sealed vacuum tube is used to provide the electrons for an electron microscope. This advantageously allows use of low vacuum at the sample, which greatly simplifies the overall design of the system. There are two main variations. In the first variation, imaging is provided by mechanically scanning the sample. In the second variation, imaging is provided by point projection. In both cases, the electron beam is fixed and does not need to be scanned during operation of the microscope. This also greatly simplifies the overall system.
Abstract translation: 永久密封的真空管用于为电子显微镜提供电子。 这有利地允许在样品处使用低真空，这极大地简化了系统的整体设计。 有两个主要的变化。 在第一变型中，通过机械扫描样品来提供成像。 在第二变型中，通过点投影提供成像。 在这两种情况下，电子束是固定的，并且在显微镜的操作期间不需要扫描。 这也大大简化了整个系统。
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3.发明授权公开(公告)号：US09000394B2
公开(公告)日：2015-04-07
申请号：US13464261
申请日：2012-05-04
Applicant: Weiming Ren , Zhongwei Chen
Inventor： Weiming Ren , Zhongwei Chen
IPC: H01J37/14
CPC classification number: H01J37/14 , B82Y10/00 , B82Y40/00 , H01J3/20 , H01J37/141 , H01J37/145 , H01J37/3177 , H01J2237/1035 , H01J2237/1415 , H01J2237/31774
Abstract: The present invention provides two ways to form a special permeability-discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.
Abstract translation: 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的渗透率不连续单元的两种方式，其具有更简单的构造或者在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁转移透镜，另一种类型是可以要求较低磁动势的多轴磁性非浸没物镜，另一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射
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公开(公告)号：US20140110597A1
公开(公告)日：2014-04-24
申请号：US14060170
申请日：2013-10-22
Applicant: FEI Company
Inventor： Lubomir Tuma , Josef Sesták
IPC: G21K5/08
CPC classification number: G21K5/08 , H01J37/1413 , H01J37/20 , H01J37/265 , H01J2237/1035 , H01J2237/1415 , H01J2237/2802 , H01J2237/2813
Abstract: The invention relates to a charged-particle apparatus having a charged particle source with an optical axis; a magnetic immersion lens comprising a first lens pole and a configurable magnetic circuit; and a first sample stage movable with respect to the optical axis. The apparatus has a first configuration to position the sample, mounted on the first stage, with respect to the optical axis and a second configuration, having a second lens pole mounted on the first stage and intersecting the optical axis, equipped with a second sample stage to position the sample between the two lens poles and is movable with respect to the optical axis, causing the optical properties of the magnetic immersion lens to differ in the two configurations, and can, in the second configuration, be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.
Abstract translation: 本发明涉及具有光轴的带电粒子源的带电粒子装置; 一种包含第一透镜柱和可配置磁路的磁浸透镜; 以及可相对于光轴移动的第一样品台。 该装置具有第一配置，用于相对于光轴定位安装在第一台上的样品，并且具有第二配置，其具有安装在第一台上并与光轴相交的第二透镜杆，该第二透镜杆装备有第二样品台 将样品定位在两个透镜杆之间并且可相对于光轴移动，导致两种结构中的浸没透镜的光学特性不同，并且可以在第二构造中通过将第二透镜 使用第一级，从而改变磁路。
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5.发明申请公开(公告)号：US20130248730A1
公开(公告)日：2013-09-26
申请号：US13895452
申请日：2013-05-16
Applicant: Hermes Microvision, Inc.
Inventor： Weiming Ren , Zhongwei Chen
IPC: H01J3/20
CPC classification number: H01J37/14 , B82Y10/00 , B82Y40/00 , H01J3/20 , H01J37/141 , H01J37/145 , H01J37/3177 , H01J2237/1035 , H01J2237/1415 , H01J2237/31774
Abstract: The present invention provides two ways to form a special permeability discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.
Abstract translation: 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的磁导率不连续单元的两种方式，其具有更简单的构造或在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁转移透镜，另一种类型是可以要求较低磁动势的多轴磁性非浸没物镜，另一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射
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Patent Agency Ranking
公开(公告)号：US20040217304A1
公开(公告)日：2004-11-04
申请号：US10861876
申请日：2004-06-03
Inventor： Lee H. Veneklasen , William J. DeVore
IPC: H01J037/30 , H01J037/153
CPC classification number: H01J37/141 , H01J2237/1035 , H01J2237/3175
Abstract: An immersion lens for a charged particle beam lithography system includes a magnetically floating shield that limits a deflection magnetic field from creating eddy currents in electrically conductive components of the system downstream from the shield. The surface of the shield lies parallel or approximately parallel to a magnetic equipotential surface of the focusing magnetic field so that the shield does not affect the focusing magnetic field. The shield is, e.g., a ferrite disk or a hollow ferrite cone defining a central bore for passage of the charged particle beam.
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公开(公告)号：US06580074B1
公开(公告)日：2003-06-17
申请号：US09230528
申请日：1999-01-27
Applicant: Mitsugu Sato , Yuko Iwabuchi
Inventor： Mitsugu Sato , Yuko Iwabuchi
IPC: G01N2300
CPC classification number: H01J37/141 , H01J2237/1035 , H01J2237/1405
Abstract: A charged particle beam irradiator makes it possible to observe an image at a high resolution and preferable contrast while reserving an operating distance of a sample or an area for the installation of a sample stage. The charged particle beam irradiator scans charged particle beams emitted by a charged particle source on a sample and obtains a scanned image of said sample based on charged particles obtained as a result of said scanning and is equipped with an electromagnetic lens having a magnetic pole provided between said sample and said charged particle source and at least a pair of magnetic poles provided under said sample and configured to generate a magnetic field there between. This configuration makes it possible to observe an image at a high resolution and preferable contrast while reserving an operating distance of the sample throughout a wide range of acceleration voltage.
Abstract translation: 带电粒子束照射器使得可以在保留样品的操作距离或用于安装样品台的区域的同时以高分辨率和优选的对比度观察图像。 带电粒子束照射器将由带电粒子源发射的带电粒子扫描在样品上，并基于作为所述扫描的结果而获得的带电粒子获得所述样品的扫描图像，并且配备有电磁透镜， 所述样品和所述带电粒子源和设置在所述样品下方的至少一对磁极，并且被配置为在其间产生磁场。 通过该结构，能够在宽范围的加速电压的同时保持样品的运转距离，以高分辨率和优选的对比度观察图像。
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公开(公告)号：US09583306B2
公开(公告)日：2017-02-28
申请号：US14964274
申请日：2015-12-09
Applicant: Hermes Microvision Inc.
Inventor： Shuai Li
IPC: G21K5/04 , H01J37/10 , H01J37/147 , H01J37/28 , H01J37/145 , H01J37/21
CPC classification number: H01J37/1478 , H01J37/145 , H01J37/21 , H01J37/28 , H01J2237/063 , H01J2237/1035 , H01J2237/12 , H01J2237/14 , H01J2237/1508 , H01J2237/1534 , H01J2237/1536 , H01J2237/2801 , H01J2237/2811
Abstract: A scanning electron microscope (SEM) with a swing objective lens (SOL) reduces the off-aberrations to enhance the image resolution, and extends the e-beam scanning angle. The scanning electron microscope comprises a charged particle source, an accelerating electrode, and a swing objective lens system including a pre-deflection unit, a swing deflection unit and an objective lens, all of them are rotationally symmetric with respect to an optical axis. The upper inner-face of the swing deflection unit is tilted an angle θ to the outer of the SEM and its lower inner-face is parallel to the optical axis. A distribution for a first and second focusing field of the swing objective lens is provided to limit the off-aberrations and can be performed by a single swing deflection unit. Preferably, the two focusing fields are overlapped by each other at least 80 percent.
Abstract translation: 具有摆动物镜（SOL）的扫描电子显微镜（SEM）减小了偏差以提高图像分辨率，并且扩展了电子束扫描角度。 扫描电子显微镜包括带电粒子源，加速电极和包括预偏转单元，摆动偏转单元和物镜的摆动物镜系统，它们都相对于光轴旋转对称。 摆动偏转单元的上部内表面与SEM的外侧倾斜角度θ，其下部内表面平行于光轴。 提供了用于摆动物镜的第一和第二聚焦场的分布以限制偏差并且可以由单个摆动偏转单元执行。 优选地，两个聚焦场彼此重叠至少80％。
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公开(公告)号：US20160172150A1
公开(公告)日：2016-06-16
申请号：US14964274
申请日：2015-12-09
Applicant: Hermes Microvision Inc.
Inventor： Shuai Li
IPC: H01J37/147 , H01J37/145 , H01J37/21 , H01J37/28
CPC classification number: H01J37/1478 , H01J37/145 , H01J37/21 , H01J37/28 , H01J2237/063 , H01J2237/1035 , H01J2237/12 , H01J2237/14 , H01J2237/1508 , H01J2237/1534 , H01J2237/1536 , H01J2237/2801 , H01J2237/2811
Abstract: A scanning electron microscope (SEM) with a swing objective lens (SOL) reduces the off-aberrations to enhance the image resolution, and extends the e-beam scanning angle. The scanning electron microscope comprises a charged particle source, an accelerating electrode, and a swing objective lens system including a pre-deflection unit, a swing deflection unit and an objective lens, all of them are rotationally symmetric with respect to an optical axis. The upper inner-face of the swing deflection unit is tilted an angle θ to the outer of the SEM and its lower inner-face is parallel to the optical axis. A distribution for a first and second focusing field of the swing objective lens is provided to limit the off-aberrations and can be performed by a single swing deflection unit. Preferably, the two focusing fields are overlapped by each other at least 80 percent.
Abstract translation: 具有摆动物镜（SOL）的扫描电子显微镜（SEM）减小了偏差以提高图像分辨率，并且扩展了电子束扫描角度。 扫描电子显微镜包括带电粒子源，加速电极和包括预偏转单元，摆动偏转单元和物镜的摆动物镜系统，它们都相对于光轴旋转对称。 摆动偏转单元的上内表面倾斜一角度; 到SEM的外侧，并且其下内表面平行于光轴。 提供了用于摆动物镜的第一和第二聚焦场的分布以限制偏差并且可以由单个摆动偏转单元执行。 优选地，两个聚焦场彼此重叠至少80％。
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10.发明申请公开(公告)号：US20130153782A1
公开(公告)日：2013-06-20
申请号：US13464261
申请日：2012-05-04
Applicant: Weiming Ren , Zhongwei Chen
Inventor： Weiming Ren , Zhongwei Chen
CPC classification number: H01J37/14 , B82Y10/00 , B82Y40/00 , H01J3/20 , H01J37/141 , H01J37/145 , H01J37/3177 , H01J2237/1035 , H01J2237/1415 , H01J2237/31774
Abstract: The present invention provides two ways to form a special permeability-discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.
Abstract translation: 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的渗透率不连续单元的两种方式，其具有更简单的构造或者在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁性转印透镜，另一种类型是可能需要较低磁动势的多轴磁性非浸没物镜，另外一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射
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