Invention Patent
AT142783T
未知
- Patent Title:
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Application No.: AT92103251Application Date: 1992-02-26
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Publication No.: AT142783TPublication Date: 1996-09-15
- Inventor: MALIN COSMAS DIPL EL ING ETH , STEIGMEIER EDGAR F DR ING ETH , NESENSOHN THOMAS , SAWATZKI HARRY L , AUDERSET HEINRICH , SCHMID GERT
- Applicant: TENCOR INSTRUMENTS
- Assignee: TENCOR INSTRUMENTS
- Current Assignee: TENCOR INSTRUMENTS
- Priority: CH215491 1991-07-20
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01M11/02 ; G01N21/88 ; G01N21/89 ; G01N21/93 ; G01N21/95 ; G01N21/956 ; G02B21/10 ; G11B5/84 ; G11B7/26 ; G01N21/47
Information query
