Patent search ap:("TENCOR INSTRUMENTS") AND inv:"MALIN COSMAS DIPL EL ING ETH" Page 1

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发明专利
未知

公开(公告)号：AT142783T

公开(公告)日：1996-09-15

申请号：AT92103251

申请日：1992-02-26

Applicant: TENCOR INSTRUMENTS

Inventor： MALIN COSMAS DIPL EL ING ETH , STEIGMEIER EDGAR F DR ING ETH , NESENSOHN THOMAS , SAWATZKI HARRY L , AUDERSET HEINRICH , SCHMID GERT

IPC: G01B11/30 , G01M11/02 , G01N21/88 , G01N21/89 , G01N21/93 , G01N21/95 , G01N21/956 , G02B21/10 , G11B5/84 , G11B7/26 , G01N21/47

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