Invention Patent
- Patent Title: A method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus.
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Application No.: NL1036018Application Date: 2008-10-06
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Publication No.: NL1036018A1Publication Date: 2009-04-15
- Inventor: BOEF ARIE JEFFREY DEN , CRAMER HUGO AUGUSTINUS JOSEPH , KRIST JOUKE , GROOTJANS WILLEM JAN
- Applicant: ASML NETHERLANDS BV
- Assignee: ASML NETHERLANDS BV
- Current Assignee: ASML NETHERLANDS BV
- Priority: US96064507 2007-10-09
- Main IPC: G01J3/45
- IPC: G01J3/45 ; G03F7/20
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