Invention Grant
- Patent Title: Cassette holder assembly for a substrate cassette and holding member for use in such assembly
-
Application No.: US15673110Application Date: 2017-08-09
-
Publication No.: US10249524B2Publication Date: 2019-04-02
- Inventor: Edwin den Hartog Besselink , Adriaan Garssen , Marco Dirkmaat
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L23/32
- IPC: H01L23/32 ; H01L21/673 ; H01L21/677
Abstract:
The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.
Public/Granted literature
- US20190051548A1 CASSETTE HOLDER ASSEMBLY FOR A SUBSTRATE CASSETTE AND HOLDING MEMBER FOR USE IN SUCH ASSEMBLY Public/Granted day:2019-02-14
Information query
IPC分类:
