公开(公告)号：US20190115237A1

公开(公告)日：2019-04-18

申请号：US16208062

申请日：2018-12-03

Applicant: ASM IP Holding B.V.

Inventor： Edwin den Hartog Besselink ,  Adriaan Garssen ,  Marco Dirkmaat

IPC: H01L21/673 ,  H01L21/677

CPC classification number: H01L21/67353 ,  H01L21/67379 ,  H01L21/67769 ,  H01L21/67775 ,  H01L23/32

Abstract: The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.

公开(公告)号：US10249524B2

公开(公告)日：2019-04-02

申请号：US15673110

申请日：2017-08-09

Applicant: ASM IP Holding B.V.

Inventor： Edwin den Hartog Besselink ,  Adriaan Garssen ,  Marco Dirkmaat

IPC: H01L23/32 ,  H01L21/673 ,  H01L21/677

Abstract: The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.

公开(公告)号：US10672636B2

公开(公告)日：2020-06-02

申请号：US16208062

申请日：2018-12-03

Applicant: ASM IP Holding B.V.

Inventor： Edwin den Hartog Besselink ,  Adriaan Garssen ,  Marco Dirkmaat

IPC: H01L21/673 ,  H01L21/677 ,  H01L23/32

Abstract: The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.

公开(公告)号：US20190051548A1

公开(公告)日：2019-02-14

申请号：US15673110

申请日：2017-08-09

Applicant: ASM IP Holding B.V.

Inventor： Edwin den Hartog Besselink ,  Adriaan Garssen ,  Marco Dirkmaat

IPC: H01L21/673 ,  H01L21/677

Abstract: The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.