Invention Grant
- Patent Title: Scanning electron microscope
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Application No.: US15914498Application Date: 2018-03-07
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Publication No.: US10269531B2Publication Date: 2019-04-23
- Inventor: Tatsuru Kuramoto , Yuichiro Ohori , Yoshinori Matsuda , Makoto Aoshima
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2017-042417 20170307
- Main IPC: H01J37/09
- IPC: H01J37/09 ; H01J37/02 ; H01J37/244 ; H01J37/28 ; H01J37/305 ; H01J37/14 ; H01J37/30

Abstract:
A scanning electron microscope having a charged particle device that processes a specimen using a charged particle beam, the scanning electron microscope includes: an electron source; a secondary-electron detector that detects secondary electrons generated from the specimen; a backscattered-electron detector that is disposed closer to the electron source than a detection surface of the secondary-electron detector to detect backscattered electrons generated from the specimen; a shielding plate for shielding a detection surface of the backscattered-electron detector; and a moving mechanism that moves the shielding plate. In a state where the shielding plate is moved by the moving mechanism so as to shield the detection surface of the backscattered-electron detector, the shielding plate is located between the detection surface of the backscattered-electron detector and the detection surface of the secondary-electron detector.
Public/Granted literature
- US20180261422A1 Scanning Electron Microscope Public/Granted day:2018-09-13
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