Invention Grant
- Patent Title: Copper film-forming agent and method for forming copper film
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Application No.: US14413532Application Date: 2013-05-30
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Publication No.: US10405422B2Publication Date: 2019-09-03
- Inventor: Shusaku Iida , Takayuki Murai , Hirohiko Hirao
- Applicant: SHIKOKU CHEMICALS CORPORATION
- Applicant Address: JP Marugame-shi, Kagawa
- Assignee: SHIKOKU CHEMICALS CORPORATION
- Current Assignee: SHIKOKU CHEMICALS CORPORATION
- Current Assignee Address: JP Marugame-shi, Kagawa
- Agency: Sughrue Mion, PLLC
- Priority: JP2012-154124 20120709
- International Application: PCT/JP2013/065108 WO 20130530
- International Announcement: WO2014/010328 WO 20140116
- Main IPC: B05D5/12
- IPC: B05D5/12 ; H05K1/09 ; C23C18/08 ; B05D1/00 ; B05D1/02 ; B05D1/18 ; B05D1/28 ; B05D1/30 ; B05D1/42 ; B05D3/02 ; B05D7/00 ; B05D7/14 ; C07F1/08 ; C22C9/00 ; C23C30/00 ; H05K3/38

Abstract:
The present invention is a copper film-forming agent containing a copper complex composed of a copper formate and a 5-membered or 6-membered nitrogen-containing heterocyclic compound having from 1 to 3 nitrogen atoms, in which the nitrogen-containing heterocyclic compound has one or two ring structures, the total number of carbon atoms contained in a substituent is from 1 to 5, and an element other than a carbon atom in the compound is not bonded to a hydrogen atom.
Public/Granted literature
- US20150189748A1 COPPER FILM-FORMING AGENT AND METHOD FOR FORMING COPPER FILM Public/Granted day:2015-07-02
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