Invention Grant
- Patent Title: Metallic ion source
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Application No.: US16313051Application Date: 2017-11-30
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Publication No.: US10418220B2Publication Date: 2019-09-17
- Inventor: Masanobu Nunogaki
- Applicant: ION LAB Co., Ltd.
- Applicant Address: JP Ashiya-shi, Hyogo
- Assignee: ION LAB Co., Ltd.
- Current Assignee: ION LAB Co., Ltd.
- Current Assignee Address: JP Ashiya-shi, Hyogo
- Agent James Judge
- Priority: JP2017-005495 20170117
- International Application: PCT/JP2017/043097 WO 20171130
- International Announcement: WO2018/135153 WO 20180726
- Main IPC: H01J7/08
- IPC: H01J7/08 ; H01J27/04 ; H01J27/08 ; H01J27/16 ; H01J27/22 ; H01J37/08

Abstract:
Metallic ion source for resolving the issue of not being able to produce high-density ions efficiently with small-scale ion sources in situations where an electron beam injecting scheme is employed as the evaporation source to evaporate a solid, and for producing high-density ions highly efficiently. Designed to be compact and lightweight, the metallic ion source also facilitates selection of the ion extraction direction. The ion source, structured exploiting the characteristic physical property that whether ionization takes place is dependent on the energy of the electron beam, is furnished with a dual evaporation-plasma chamber that inside the same chamber enables a high-speed electron beam, whose ionization efficiency is low, and low-speed electrons generated by electric discharge, whose ionization efficiency is high, to participate independently and simultaneously in, respectively, evaporation of precursor and ionization action.
Public/Granted literature
- US20190198281A1 Metallic Ion Source Public/Granted day:2019-06-27
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