Invention Grant
- Patent Title: Techniques for forming non-planar resistive memory cells
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Application No.: US15117594Application Date: 2014-03-25
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Publication No.: US10439134B2Publication Date: 2019-10-08
- Inventor: Prashant Majhi , Elijah V. Karpov , Uday Shah , Niloy Mukherjee , Charles C. Kuo , Ravi Pillarisetty , Brian S. Doyle , Robert S. Chau
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Finch & Maloney PLLC
- International Application: PCT/US2014/031735 WO 20140325
- International Announcement: WO2015/147801 WO 20151001
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
Techniques are disclosed for forming non-planar resistive memory cells, such as non-planar resistive random-access memory (ReRAM or RRAM) cells. The techniques can be used to reduce forming voltage requirements and/or resistances involved (such as the resistance during the low-resistance state) relative to planar resistive memory cells for a given memory cell space. The non-planar resistive memory cell includes a first electrode, a second electrode, and a switching layer disposed between the first and second electrodes. The second electrode may be substantially between opposing portions of the switching layer, and the first electrode may be substantially adjacent to at least two sides of the switching layer, after the non-planar resistive memory cell is formed. In some cases, an oxygen exchange layer (OEL) may be disposed between the switching layer and one of the first and second electrodes to, for example, increase flexibility in incorporating materials in the cell.
Public/Granted literature
- US20160359108A1 TECHNIQUES FOR FORMING NON-PLANAR RESISTIVE MEMORY CELLS Public/Granted day:2016-12-08
Information query
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