A particle sensing device, including a substrate and at least one particle sensing element, is provided. The substrate has a groove, and a through hole is disposed at a bottom of the groove. The through hole penetrates a bottom of the substrate. The particle sensing element is disposed in the substrate. The particle sensing element may include a first electrode pair and a second electrode pair. Two first sub-electrodes of the first electrode pair are disposed nearby two sides of the groove, respectively. And, a first distance is provided between the two first sub-electrodes. Two second sub-electrodes of the second electrode pair are disposed nearby two sides of the groove, respectively. And, a second distance is provided between the two second sub-electrodes. The first distance is smaller than the second distance.