Invention Grant
- Patent Title: Fluid analyzer
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Application No.: US16021055Application Date: 2018-06-28
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Publication No.: US10591413B2Publication Date: 2020-03-17
- Inventor: Tatsuo Dougakiuchi , Akio Ito , Kazuue Fujita , Tadataka Edamura
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2017-131957 20170705
- Main IPC: G01J3/30
- IPC: G01J3/30 ; G01N21/39 ; H01S5/343 ; H01S5/10 ; H01S5/20 ; H01S5/026 ; H01S5/00 ; H01L31/0352 ; H01S5/34 ; H01S5/22 ; H01S5/02 ; G01N21/45 ; H01S5/14 ; H01S5/12 ; H01S5/065

Abstract:
A fluid analyzer includes a substrate, a quantum cascade laser formed on a surface of the substrate and including a first light-emitting surface and a second light-emitting surface facing each other in a predetermined direction parallel to the surface, a quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a light incident surface facing the second light-emitting surface in the predetermined direction, and an optical element disposed on an optical path of light emitted from the first light-emitting surface across an inspection region in which a fluid to be analyzed is to be disposed and reflecting the light to feed the light back to the first light-emitting surface.
Public/Granted literature
- US20190011361A1 FLUID ANALYZER Public/Granted day:2019-01-10
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