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公开(公告)号:US10574030B2
公开(公告)日:2020-02-25
申请号:US16051547
申请日:2018-08-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Tadataka Edamura , Atsushi Sugiyama , Tatsuo Dougakiuchi
Abstract: An external resonance type laser module includes a quantum cascade laser, a MEMS diffraction grating configured to include a diffraction/reflection portion configured to diffract and reflect light emitted from the quantum cascade laser and return a part of the light to the quantum cascade laser by swinging the diffraction/reflection portion, and a controller configured to control driving of the quantum cascade laser. The controller is configured to pulse-drive the quantum cascade laser such that pulsed light of a second frequency higher than a first frequency at which the diffraction/reflection portion swings is emitted from the quantum cascade laser and a phase of the pulsed light changes each time the diffraction/reflection portion reciprocates m times (m: an integer of 1 or more).
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公开(公告)号:US10439363B2
公开(公告)日:2019-10-08
申请号:US16121825
申请日:2018-09-05
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Akio Ito , Kazuue Fujita , Daisuke Kawaguchi , Tatsuo Dougakiuchi , Tadataka Edamura
Abstract: A method of manufacturing a quantum cascade laser beam source (1) includes: preparing a semiconductor stacked body (20); forming a pair of first excavated portions (41 and 42) and a ridge portion which is interposed between the pair of first excavated portions (41 and 42); forming channel structures (51 and 52) and circumferential edge portions (61 and 62) which are formed to interpose the channel structures (51 and 52) between the ridge portion (30) and the circumferential edge portion; forming an electrode pattern (81) in contact with a first area (29a) and forming an electrode pattern (82) in contact with a second area (22a); fixing a crystal growth surface side to a support substrate (91); removing an Fe-doped (semi-insulating) InP single-crystal substrate (21); fixing a Si substrate (93); and peeling the support substrate (91).
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公开(公告)号:US09276144B2
公开(公告)日:2016-03-01
申请号:US14525415
申请日:2014-10-28
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Kazuue Fujita , Toru Hirohata , Tadataka Edamura , Tatsuo Dougakiuchi
IPC: H01L31/00 , H01L31/0352 , H01L31/09 , H01L31/105 , H01L31/0687
CPC classification number: H01L31/035236 , H01L31/06875 , H01L31/09 , H01L31/105
Abstract: A quantum cascade detector includes a semiconductor substrate, and an active layer formed by laminating unit laminate structures each having an absorption region with a first barrier layer to a second well layer and a transport region with a third barrier layer to an n-th well layer. A second absorption well layer has a layer thickness ½ or less of that of a first absorption well layer thickest in one period, and a coupling barrier layer has a layer thickness smaller than that of an exit barrier layer thickest in one period. The unit laminate structure has a detection lower level arising from a ground level in the first well layer, a detection upper level generated by coupling an excitation level in the first well layer and a ground level in the second well layer, and a transport level structure for electrons.
Abstract translation: 量子级联检测器包括半导体衬底和通过层叠单元层压结构形成的有源层,每个层叠结构具有带有第一阻挡层的吸收区域到第二阱层以及具有第三阻挡层到第n阱层的传输区域 。 第二吸收阱层具有在一个周期中最厚的第一吸收阱层的层厚度的1/2或更小,并且耦合阻挡层的层厚度小于在一个周期中最厚的出口阻挡层的层厚度。 单元层叠结构具有从第一阱层的地电平产生的检测下位电平,通过耦合第一阱层中的激发电平而产生的检测上限电平和第二阱层中的接地电平,以及传输电平结构 对于电子。
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公开(公告)号:US12176681B2
公开(公告)日:2024-12-24
申请号:US17439884
申请日:2020-01-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Tatsuo Dougakiuchi , Yoichi Kawada
IPC: H01S5/14 , H01S5/02325 , H01S5/34
Abstract: An optical kit includes a base including a main surface; and a holding unit provided on the main surface to hold an optical system. The holding unit includes a lens holding unit that holds a lens, a reflector holding unit that holds a corner reflector, a first aperture member holding unit that holds a first aperture member, a second aperture member holding unit that holds a second aperture member, and a third aperture member holding unit that holds a third aperture member. The reflector holding unit includes a first mechanism that holds an entirety of the corner reflector so as to be rotatable along the main surface, and a second mechanism configured to adjust an optical axis of a diffracted light in each of a reflective diffraction grating and a mirror.
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公开(公告)号:USD960009S1
公开(公告)日:2022-08-09
申请号:US29750378
申请日:2020-09-14
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Tatsuo Dougakiuchi , Akio Ito , Masahiro Hitaka , Tadataka Edamura
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公开(公告)号:USD960007S1
公开(公告)日:2022-08-09
申请号:US29749999
申请日:2020-09-10
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Tatsuo Dougakiuchi , Akio Ito , Masahiro Hitaka , Tadataka Edamura
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公开(公告)号:USD892657S1
公开(公告)日:2020-08-11
申请号:US29684297
申请日:2019-03-20
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Tatsuo Dougakiuchi , Akio Ito , Masahiro Hitaka , Tadataka Edamura
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公开(公告)号:USD960008S1
公开(公告)日:2022-08-09
申请号:US29750114
申请日:2020-09-11
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Tatsuo Dougakiuchi , Akio Ito , Masahiro Hitaka , Tadataka Edamura
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公开(公告)号:US10591413B2
公开(公告)日:2020-03-17
申请号:US16021055
申请日:2018-06-28
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Tatsuo Dougakiuchi , Akio Ito , Kazuue Fujita , Tadataka Edamura
IPC: G01J3/30 , G01N21/39 , H01S5/343 , H01S5/10 , H01S5/20 , H01S5/026 , H01S5/00 , H01L31/0352 , H01S5/34 , H01S5/22 , H01S5/02 , G01N21/45 , H01S5/14 , H01S5/12 , H01S5/065
Abstract: A fluid analyzer includes a substrate, a quantum cascade laser formed on a surface of the substrate and including a first light-emitting surface and a second light-emitting surface facing each other in a predetermined direction parallel to the surface, a quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a light incident surface facing the second light-emitting surface in the predetermined direction, and an optical element disposed on an optical path of light emitted from the first light-emitting surface across an inspection region in which a fluid to be analyzed is to be disposed and reflecting the light to feed the light back to the first light-emitting surface.
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公开(公告)号:US10014662B2
公开(公告)日:2018-07-03
申请号:US15193249
申请日:2016-06-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Kazuue Fujita , Akio Ito , Tadataka Edamura , Tatsuo Dougakiuchi
CPC classification number: H01S5/2018 , H01S5/0604 , H01S5/1096 , H01S5/18 , H01S5/24 , H01S5/3402 , H01S5/34306 , H01S2302/02
Abstract: A quantum cascade laser is configured with a semiconductor substrate, and an active layer provided on a first surface of the substrate and having a cascade structure in the form of a multistage lamination of unit laminate structures each of which includes an emission layer and an injection layer. The active layer is configured to be capable of generating first pump light of a frequency ω1 and second pump light of a frequency ω2 by intersubband emission transitions of electrons, and to generate output light of a difference frequency ω by difference frequency generation from the first pump light and the second pump light. Grooves respectively formed in a direction intersecting with a resonating direction in a laser cavity structure are provided on a second surface opposite to the first surface of the substrate.
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