Invention Grant
- Patent Title: Measurement method and electron microscope
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Application No.: US16131677Application Date: 2018-09-14
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Publication No.: US10714308B2Publication Date: 2020-07-14
- Inventor: Yuji Kohno
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@74b0ddbd
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/24 ; H01J37/26 ; H01J37/244

Abstract:
Provided is a measurement method for measuring, in an electron microscope including a segmented detector having a detection plane segmented into a plurality of detection regions, a direction of each of the plurality of detection regions in a scanning transmission electron microscope (STEM) image, the measurement method including: shifting an electron beam EB incident on a sample S under a state where the detection plane is conjugate to a plane shifted from a diffraction plane to shift the electron beam EB on the detection plane, and measuring a shift direction of the electron beam EB on the detection plane with the segmented detector; and obtaining the direction of each of the plurality of detection regions in the STEM image from the shift direction.
Public/Granted literature
- US20190088447A1 Measurement Method and Electron Microscope Public/Granted day:2019-03-21
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