Invention Grant
- Patent Title: Electron microscope and control method
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Application No.: US15972744Application Date: 2018-05-07
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Publication No.: US10741359B2Publication Date: 2020-08-11
- Inventor: Akira Abe
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@58878a2b
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/147 ; H01J37/22 ; H01J37/252 ; G01N23/225 ; G06T7/00 ; G06T7/136 ; G06T7/11

Abstract:
An electron microscope includes: a display control unit which sequentially acquires electron microscope images of a sample and causes a display unit to display the electron microscope images as a live image; an analysis area setting unit which sets an analysis area on the sample based on a designated position on the live image designated by pointing means; and an analysis control unit which performs control for executing elemental analysis of the set analysis area. The analysis area setting unit sets, as the analysis area, an area on the sample which corresponds to a continuous area including the designated position and having brightness comparable to brightness of the designated position.
Public/Granted literature
- US20180330917A1 Electron Microscope and Control Method Public/Granted day:2018-11-15
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