Invention Grant
- Patent Title: EELS detection technique in an electron microscope
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Application No.: US16424206Application Date: 2019-05-28
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Publication No.: US10832901B2Publication Date: 2020-11-10
- Inventor: Bert Henning Freitag , Sorin Lazar , Stephan Kujawa , Maarten Kuijper , Gerard Nicolaas Anne van Veen , Peter Christiaan Tiemeijer , Jamie McCormack
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1fca3e03
- Main IPC: H01J49/44
- IPC: H01J49/44 ; H01J49/00 ; H01J49/02 ; H01J49/08

Abstract:
A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising: Producing a beam of electrons from a source; Using an illuminator to direct said beam so as to irradiate the specimen; Using an imaging system to receive a flux of electrons transmitted through the specimen and direct it onto a spectroscopic apparatus comprising: A dispersion device, for dispersing said flux in a dispersion direction so as to form an EELS spectrum; and A detector, comprising a detection surface that is sub-divided into a plurality of detection zones, specifically comprising: Using at least a first detection zone, a second detection zone and a third detection zone to register a plurality of EELS spectral entities; and Reading out said first and said second detection zones whilst said third detection zone is registering one of said plurality of EELS spectral entities.
Public/Granted literature
- US20190341243A1 EELS DETECTION TECHNIQUE IN AN ELECTRON MICROSCOPE Public/Granted day:2019-11-07
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