Invention Grant
- Patent Title: Polarization property image measurement device, and polarization property image measurement method
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Application No.: US16781474Application Date: 2020-02-04
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Publication No.: US11268900B2Publication Date: 2022-03-08
- Inventor: Takanori Kojima , Satoru Odate , Toru Takagi
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JPJP2015-242559 20151211
- Main IPC: G01N21/21
- IPC: G01N21/21 ; G01N21/31 ; G01N21/25 ; G01J3/51 ; G01J3/28 ; G01J3/02 ; G01J4/04 ; G01J4/00 ; G01J3/00 ; H01L27/146 ; G06T15/00 ; A61B1/06 ; A61B1/00 ; A61B1/04 ; G06T7/521 ; G01N21/47 ; G01J1/42

Abstract:
A polarization property image measurement device includes: a first radiation unit that radiates light beams in different polarization conditions onto a target object after subjecting the light beams to intensity modulation at frequencies different from one another; a light receiving unit including first photoelectric conversion units that photoelectrically convert the light beams having been radiated from the first radiation unit and scattered at the target object in correspondence to each of the different polarization conditions, and second photoelectric conversion units that photoelectrically convert visible light from the target object; and a processor that detects signals individually output from the first photoelectric conversion units at the different frequencies and differentiates each signal from other signals so as to determine an origin of the signal as one of the light beams; and creates an image of the target object based upon signals individually output from the second photoelectric conversion units.
Public/Granted literature
- US20200173911A1 POLARIZATION PROPERTY IMAGE MEASUREMENT DEVICE, AND POLARIZATION PROPERTY IMAGE MEASUREMENT METHOD Public/Granted day:2020-06-04
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