Invention Grant
- Patent Title: Ion source with multiple bias electrodes
-
Application No.: US17318325Application Date: 2021-05-12
-
Publication No.: US11545330B2Publication Date: 2023-01-03
- Inventor: Wilhelm Platow , Paul Silverstein , Neil Bassom , Marvin Farley , David Sporleder
- Applicant: Axcelis Technologies, Inc.
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01J27/02
- IPC: H01J27/02 ; H01J27/08

Abstract:
An ion source has an arc chamber having first and second ends and an aperture plate to enclose a chamber volume. An extraction aperture is disposed between the first and second ends. A cathode is near the first end of the arc chamber, and a repeller is near the second end. A generally U-shaped first bias electrode is on a first side of the extraction aperture within the chamber volume. A generally U-shaped second bias electrode is on a second side of the extraction aperture within the chamber volume, where the first and second bias electrodes are separated by a first distance proximate to the extraction aperture and a second distance distal from the extraction aperture. An electrode power supply provides a first and second positive voltage to the first and second bias electrodes, where the first and second positive voltages differ by a predetermined bias differential.
Public/Granted literature
- US20220367138A1 ION SOURCE WITH MULTIPLE BIAS ELECTRODES Public/Granted day:2022-11-17
Information query