Invention Grant
- Patent Title: Metal oxide (MO) semiconductor and thin-film transistor and application thereof
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Application No.: US17158026Application Date: 2021-01-26
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Publication No.: US11545581B2Publication Date: 2023-01-03
- Inventor: Miao Xu , Hua Xu , Min Li , Junbiao Peng , Lei Wang , Jian Hua Zou , Hong Tao
- Applicant: SOUTH CHINA UNIVERSITY OF TECHNOLOGY
- Applicant Address: CN Guangzhou
- Assignee: SOUTH CHINA UNIVERSITY OF TECHNOLOGY
- Current Assignee: SOUTH CHINA UNIVERSITY OF TECHNOLOGY
- Current Assignee Address: CN Guangzhou
- Priority: CN202011314502.3 20201120
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/786

Abstract:
The present invention discloses a metal oxide (MO) semiconductor, which is implemented by respectively doping at least an oxide of rare earth element R and an oxide of rare earth element R′ into an indium-containing MO semiconductor to form an InxMyRnR′mOz semiconductor. According to the present invention, the extremely high oxygen bond breaking energy in the oxide of rare earth element R is used to effectively control the carrier concentration in the semiconductor, and a charge transportation center can be formed by using the characteristic that the radius of rare earth ions is equivalent to the radius of indium ions, so that the electrical stability of the semiconductor is improved. The present invention further provides a thin-film transistor based on the MO semiconductor and application thereof.
Public/Granted literature
- US20210151606A1 METAL OXIDE (MO) SEMICONDUCTOR AND THIN-FILM TRANSISTOR AND APPLICATION THEREOF Public/Granted day:2021-05-20
Information query
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