Invention Grant
- Patent Title: Multistage-connected multipole, multistage multipole unit, and charged particle beam device
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Application No.: US17297581Application Date: 2019-12-23
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Publication No.: US11769650B2Publication Date: 2023-09-26
- Inventor: Hideto Dohi , Yoshinobu Ootaka , Masashi Inada , Hideyuki Kazumi , Hideo Kashima
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Tech Corporation
- Current Assignee: Hitachi High-Tech Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP 19007890 2019.01.21
- International Application: PCT/JP2019/050318 2019.12.23
- International Announcement: WO2020/153074A 2020.07.30
- Date entered country: 2021-05-27
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/141 ; H01J37/147 ; H01J37/153

Abstract:
Provided are a multistage-connected multipole and a charged particle beam device that can be produced with precision in machining without requiring precision in brazing between a pole and an insulation material. This multi-stage connected multipole 100 comprises: a plurality of poles Q1-Q4 that are arranged along the optical-axis direction of a charged particle beam, and that have cutouts Non surfaces facing each other; and braces P1-P3 that are arranged between the plurality of poles Q1-Q4 and are made of an insulator. The poles Q1-Q4 and the braces P1-P3 are joined by fitting the braces P1-P3 into the cutouts N and applying brazing so as to be interposed by a bonding material.
Public/Granted literature
- US20220037113A1 Multistage-Connected Multipole, Multistage Multipole Unit, and Charged Particle Beam Device Public/Granted day:2022-02-03
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