公开(公告)号：US11769650B2

公开(公告)日：2023-09-26

申请号：US17297581

申请日：2019-12-23

Applicant: Hitachi High-Tech Corporation

Inventor： Hideto Dohi ,  Yoshinobu Ootaka ,  Masashi Inada ,  Hideyuki Kazumi ,  Hideo Kashima

IPC: H01J37/28 ,  H01J37/141 ,  H01J37/147 ,  H01J37/153

CPC classification number: H01J37/28 ,  H01J37/1413 ,  H01J37/1474 ,  H01J37/153 ,  H01J2237/032 ,  H01J2237/1534

Abstract: Provided are a multistage-connected multipole and a charged particle beam device that can be produced with precision in machining without requiring precision in brazing between a pole and an insulation material. This multi-stage connected multipole 100 comprises: a plurality of poles Q1-Q4 that are arranged along the optical-axis direction of a charged particle beam, and that have cutouts Non surfaces facing each other; and braces P1-P3 that are arranged between the plurality of poles Q1-Q4 and are made of an insulator. The poles Q1-Q4 and the braces P1-P3 are joined by fitting the braces P1-P3 into the cutouts N and applying brazing so as to be interposed by a bonding material.