Invention Grant
- Patent Title: Laser system and electronic device manufacturing method
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Application No.: US17517982Application Date: 2021-11-03
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Publication No.: US11784453B2Publication Date: 2023-10-10
- Inventor: Yuki Tamaru , Taisuke Miura
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/23
- IPC: H01S3/23 ; H01S3/225

Abstract:
A laser system includes a beam shaping unit, a random phase plate, and a collimating optical system in an optical path between a solid-state laser device and an excimer amplifier. When a traveling direction of a laser beam entering the excimer amplifier is a Z direction, a discharge direction of a pair of discharge electrodes is a V direction, a direction orthogonal to the V and Z directions is an H direction, a shaping direction of the beam shaping unit corresponding to the V direction is a first direction, a shaping direction of the beam shaping unit corresponding to the H direction is a second direction, an expansion rate in the first direction is E1, and an expansion rate in the second direction is E2, the beam shaping unit expands a beam section of the laser beam such that an expansion ratio defined by E2/E1 is higher than 1.
Public/Granted literature
- US11870209B2 Laser system and electronic device manufacturing method Public/Granted day:2024-01-09
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