Invention Grant
- Patent Title: Aluminum nitride passivation layer for mercury cadmium telluride in an electrical device
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Application No.: US17326615Application Date: 2021-05-21
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Publication No.: US11851785B2Publication Date: 2023-12-26
- Inventor: Andrew Clarke , David R. Rhiger , George Grama , Stuart B. Farrell
- Applicant: Raytheon Company
- Applicant Address: US MA Waltham
- Assignee: Raytheon Company
- Current Assignee: Raytheon Company
- Current Assignee Address: US MA Waltham
- Agency: Renner, Otto, Boisselle & Sklar
- Main IPC: H01L31/18
- IPC: H01L31/18 ; C30B25/18 ; C30B29/40 ; C30B29/60

Abstract:
An electrical device includes an aluminum nitride passivation layer for a mercury cadmium telluride (Hg1-xCdxTe) (MCT) semiconductor layer of the device. The AlN passivation layer may be an un-textured amorphous-to-polycrystalline film that is deposited onto the surface of the MCT in its as-grown state, or overlying the MCT after the MCT surface has been pre-treated or partially passivated, in this way fully passivating the MCT. The AlN passivation layer may have a coefficient of thermal expansion (CTE) that closely matches the CTE of the MCT layer, thereby reducing strain at an interface to the MCT. The AlN passivation layer may be formed with a neutral inherent (residual) stress, provide mechanical rigidity, and chemical resistance to protect the MCT.
Public/Granted literature
- US20220372651A1 ALUMINUM NITRIDE PASSIVATION LAYER FOR MERCURY CADMIUM TELLURIDE IN AN ELECTRICAL DEVICE Public/Granted day:2022-11-24
Information query
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