Invention Grant
- Patent Title: Deposition device and deposition method
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Application No.: US18151482Application Date: 2023-01-09
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Publication No.: US11958073B2Publication Date: 2024-04-16
- Inventor: Takanobu Takenaka , Atsushi Takeda
- Applicant: Japan Display Inc.
- Applicant Address: JP Tokyo
- Assignee: JAPAN DISPLAY INC.
- Current Assignee: JAPAN DISPLAY INC.
- Current Assignee Address: JP Tokyo
- Agency: XSENSUS LLP
- Priority: JP 22003106 2022.01.12
- Main IPC: B05D1/00
- IPC: B05D1/00 ; B05D1/36 ; H10K71/16

Abstract:
According to one embodiment, a deposition method includes preparing a processing substrate in which a lower electrode, a rib, and a partition including a lower portion and an upper portion arranged on the lower portion and protruding from a side surface of the lower portion are formed above a substrate, setting a spread angle of vapor of a first material emitted from a first deposition head to a first angle, and depositing the first material on the processing substrate, and setting a spread angle of vapor of a second material emitted from a second deposition head to a second angle larger than the first angle, and depositing the second material on the processing substrate on which the first material is deposited.
Public/Granted literature
- US20230219114A1 DEPOSITION DEVICE AND DEPOSITION METHOD Public/Granted day:2023-07-13
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