Mass spectrometer and method of controlling the same
Abstract:
There is provided a mass spectrometer that can appropriately maintain the atmospheric pressure of a vacuum chamber, and a method of controlling the same. An example of a mass spectrometer according to the present invention includes first vacuum chambers, first vacuum pumps, an atmospheric pressure relating value acquiring unit, and an adjustment unit configured to adjust the effective exhaust velocity of the first vacuum pumps, and controllers. The controllers control the adjustment unit corresponding to an atmospheric pressure relating value.
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