Invention Grant
- Patent Title: Mass spectrometer and method of controlling the same
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Application No.: US17628388Application Date: 2020-07-22
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Publication No.: US12033842B2Publication Date: 2024-07-09
- Inventor: Hiroyuki Yasuda , Yuichiro Hashimoto , Yuka Sugawara , Riku Tamura
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker Botts L.L.P.
- Priority: JP 19138005 2019.07.26
- International Application: PCT/JP2020/028373 2020.07.22
- International Announcement: WO2021/020260A 2021.02.04
- Date entered country: 2022-01-19
- Main IPC: H01J49/06
- IPC: H01J49/06 ; G01N30/72 ; G01N35/00 ; H01J49/24 ; H01J49/42 ; G01N30/32

Abstract:
There is provided a mass spectrometer that can appropriately maintain the atmospheric pressure of a vacuum chamber, and a method of controlling the same. An example of a mass spectrometer according to the present invention includes first vacuum chambers, first vacuum pumps, an atmospheric pressure relating value acquiring unit, and an adjustment unit configured to adjust the effective exhaust velocity of the first vacuum pumps, and controllers. The controllers control the adjustment unit corresponding to an atmospheric pressure relating value.
Public/Granted literature
- US20220270868A1 MASS SPECTROMETER AND METHOD OF CONTROLLING THE SAME Public/Granted day:2022-08-25
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