Invention Grant
- Patent Title: Laser-sustained plasma source based on colliding liquid jets
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Application No.: US18132162Application Date: 2023-04-07
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Publication No.: US12033845B2Publication Date: 2024-07-09
- Inventor: John Szilagyi , Ilya Bezel
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J65/04
- IPC: H01J65/04 ; H01J61/02 ; H01J61/16 ; H01J61/28 ; H01J61/52

Abstract:
A laser-sustained broadband light source includes a gas containment structure and multiple jet nozzles. The jet nozzles are configured to direct multiple liquid jets of plasma-forming material in directions to collide with one another within the gas containment structure. The laser-sustained broadband light source further includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure at a collision point of the plurality of liquid jets and a light collector element configured to collect broadband light emitted from the plasma.
Public/Granted literature
- US20230335389A1 LASER-SUSTAINED PLASMA SOURCE BASED ON COLLIDING LIQUID JETS Public/Granted day:2023-10-19
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