Invention Grant
- Patent Title: Automated ion-beam alignment for dual-beam instrument
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Application No.: US17750569Application Date: 2022-05-23
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Publication No.: US12154757B2Publication Date: 2024-11-26
- Inventor: Jeremy Graham
- Applicant: FEI COMPANY
- Applicant Address: US OR Hillsboro
- Assignee: FEI COMPANY
- Current Assignee: FEI COMPANY
- Current Assignee Address: US OR Hillsboro
- Agency: Michael Best & Friedrich LLP
- Main IPC: H01J37/304
- IPC: H01J37/304 ; H01J37/141 ; H01J37/147 ; H01J37/21 ; H01J37/26 ; H01J37/28 ; H01J37/05

Abstract:
Disclosed herein are scientific instrument support systems, as well as related methods, apparatus, computing devices, and computer-readable media. For example, some embodiments provide a scientific instrument comprising an ion-beam instrument configured to generate an ion beam including first and second sub-beams; an electron-beam instrument including a charged-particle-beam (CPB) lens having an adjustable setting controlling a magnetic force applied to the first and second sub-beams; and a computing device. The computing device is configured to: acquire an image by causing the ion-beam instrument to scan the ion beam across a sample using a selected setting of the CPB lens of the electron-beam instrument, apply automated image processing to the image to quantify an amount of spatial misalignment of the first and second sub-beams at the sample, and control the CPB lens of the electron-beam instrument to a setting based on the amount of spatial misalignment within the image.
Public/Granted literature
- US20230377830A1 AUTOMATED ION-BEAM ALIGNMENT FOR DUAL-BEAM INSTRUMENT Public/Granted day:2023-11-23
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