Invention Grant
- Patent Title: Piezoelectric micromachined ultrasonic transducer with a patterned membrane structure
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Application No.: US18381104Application Date: 2023-10-17
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Publication No.: US12284920B2Publication Date: 2025-04-22
- Inventor: Andre Guedes , Fabian Goericke , Stefon Shelton , Benedict Costello , David Horsley
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: InvenSense, Inc.
- Current Assignee: InvenSense, Inc.
- Current Assignee Address: US CA San Jose
- Agency: DLA Piper LLP (US)
- Main IPC: H10N30/50
- IPC: H10N30/50 ; H04R17/00 ; H10N30/057 ; H10N30/87 ; H10N30/88

Abstract:
A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form in a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.
Public/Granted literature
- US20240049602A1 Piezoelectric Micromachined Ultrasonic Transducer With A Patterned Membrane Structure Public/Granted day:2024-02-08
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