Invention Application
- Patent Title: CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS
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Application No.: US17856722Application Date: 2022-07-01
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Publication No.: US20230005706A1Publication Date: 2023-01-05
- Inventor: Albertus Victor Gerardus MANGNUS , Erwin SLOT
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP21183811 20210705
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/145 ; H01J37/28
Abstract:
A detector for use in a charged particle device for an assessment tool to detect signal particles from a sample, the detector including a substrate, the substrate including: a semiconductor element configured to detect signal particles above a first energy threshold; and a charge-based element configured to detect signal particles below a second energy threshold.
Information query
