Invention Grant
US08028709B2 Photoresist dispenser with nozzle arrangement for cone-shaped spray
有权
光刻胶分配器，具有锥形喷雾喷嘴装置
- Patent Title: Photoresist dispenser with nozzle arrangement for cone-shaped spray
- Patent Title (中): 光刻胶分配器，具有锥形喷雾喷嘴装置
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Application No.: US12351987Application Date: 2009-01-12
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Publication No.: US08028709B2Publication Date: 2011-10-04
- Inventor: Adrian Salinas , Joel Peterson
- Applicant: Adrian Salinas , Joel Peterson
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Warren L. Franz; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: B08B3/04
- IPC: B08B3/04 ; B08B3/00 ; B08B3/12 ; B08B6/00 ; B05C11/00 ; B05C13/00 ; B05C13/02
Abstract:
A cleaning system which can be integrated into a coater track system for use in the production of semiconductor devices and methods for its use are provided. The cleaning system can include a series of nozzles having assorted configurations and features which provide uniform and efficient rinsing of excess material.
Public/Granted literature
- US20100175722A1 ENHANCED COAT BOWL WASH: COATER TRACKS/WORKCELLS Public/Granted day:2010-07-15
Information query
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