Invention Grant
- Patent Title: Imprint system for performing a treatment on a template
- Patent Title (中): 用于对模板进行处理的压印系统
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Application No.: US13378163Application Date: 2010-06-21
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Publication No.: US08840728B2Publication Date: 2014-09-23
- Inventor: Shoichi Terada , Yoshio Kimura , Takahiro Kitano
- Applicant: Shoichi Terada , Yoshio Kimura , Takahiro Kitano
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Posz Law Group, PLC
- Priority: JP2009-149849 20090624
- International Application: PCT/JP2010/060465 WO 20100621
- International Announcement: WO2010/150742 WO 20101229
- Main IPC: C23C16/00
- IPC: C23C16/00 ; B05C21/00 ; B05C13/02 ; B05C13/00 ; H01L21/687 ; H01L21/56 ; H01L21/673 ; H01L21/67 ; G03F7/00 ; B82Y10/00 ; B82Y40/00 ; B29C33/58 ; B28B7/38 ; B65B33/00 ; B05D3/02
Abstract:
The present invention is a template treatment apparatus forming a film of a release agent on a template having a transfer pattern formed on a front surface thereof, the template treatment apparatus including: a treatment station forming a film of a release agent on the front surface of the template; and a template carry-in/out station capable of keeping a plurality of the templates, and carrying the template into/out of the treatment station, wherein the treatment station includes: a cleaning unit cleaning the front surface of the template; a coating unit applying a release agent to the cleaned front surface of the template; a heating unit baking the applied release agent; and a carry unit carrying the template to the cleaning unit, the coating unit, and the heating unit.
Public/Granted literature
- US20120097336A1 TEMPLATE TREATMENT APPARATUS AND IMPRINT SYSTEM Public/Granted day:2012-04-26
Information query
IPC分类:
