Invention Grant
US09117619B2 Device for generating heavy-ion beam and method thereof 有权
用于产生重离子束的装置及其方法

Device for generating heavy-ion beam and method thereof
Abstract:
There is provided a device for generating a heavy-ion beam. The device includes a laser beam generating unit configured to generate a laser beam; a target configured to generate a heavy-ion beam by the laser beam; a laser optical system configured to focus the laser beam on the front of the target; and a plasma treating unit disposed at a rear surface of the target and configured to remove impurities within the target by plasma surface treatment that is performed by radiating cationic plasma onto the rear surface of the target.
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