Invention Grant
- Patent Title: Device for generating heavy-ion beam and method thereof
- Patent Title (中): 用于产生重离子束的装置及其方法
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Application No.: US14534076Application Date: 2014-11-05
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Publication No.: US09117619B2Publication Date: 2015-08-25
- Inventor: Dong-Ho Shin , Moon-Youn Jung
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2013-0135051 20131107; KR10-2014-0122284 20140915
- Main IPC: B05D3/06
- IPC: B05D3/06 ; B05D3/04 ; H01J27/02 ; H01J27/00 ; H01J27/24

Abstract:
There is provided a device for generating a heavy-ion beam. The device includes a laser beam generating unit configured to generate a laser beam; a target configured to generate a heavy-ion beam by the laser beam; a laser optical system configured to focus the laser beam on the front of the target; and a plasma treating unit disposed at a rear surface of the target and configured to remove impurities within the target by plasma surface treatment that is performed by radiating cationic plasma onto the rear surface of the target.
Public/Granted literature
- US20150123009A1 DEVICE FOR GENERATING HEAVY-ION BEAM AND METHOD THEREOF Public/Granted day:2015-05-07
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