Invention Grant
US09251997B2 Method for processing and/or for observing an object, and particle beam device for carrying out the method
有权
用于处理和/或观察物体的方法以及用于执行该方法的粒子束装置
- Patent Title: Method for processing and/or for observing an object, and particle beam device for carrying out the method
- Patent Title (中): 用于处理和/或观察物体的方法以及用于执行该方法的粒子束装置
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Application No.: US14462808Application Date: 2014-08-19
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Publication No.: US09251997B2Publication Date: 2016-02-02
- Inventor: Josef Biberger , Ralph Pulwey , Katja Tsyrulin , Roland Salzer
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Muirhead and Saturnelli, LLC
- Priority: DE102013216418 20130819; DE102013216857 20130823
- Main IPC: B82Y10/00
- IPC: B82Y10/00 ; H01J37/302 ; H01J37/28 ; H01J37/305 ; H01J37/304

Abstract:
A method is provided for processing and/or observing an object using at least one particle beam that is scanned over the object. A scan region on the object is determined, the scan region having scan lines, and the particle beam is moved in a first scanning direction along one of the scan lines. The first scanning direction is changed to a second scanning direction at a change-of-direction time. Changing from the first scanning direction to the second scanning direction comprises setting of a point of rotation in that scan line of the scan region in which the particle beam is situated at the change-of-direction time, with an axis of rotation extending through the point of rotation. The first scanning direction is changed into the second scanning direction by rotating the scan region about the axis of rotation, with the point of rotation being selected dependent on the direction of rotation.
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