A method for making a heat treated (HT) coated article including an electrode, to be used in applications such as windows, electronic devices, or other applications. The method may include heat treating a substrate coated with at least a transparent conductive oxide (TCO) layer and an overlying film. From the TCO outwardly, the overlying film may include any combination of two, three or four of: (i) a gettering and/or doping layer(s); (ii) a stabilizing layer(s); (iii) a release layer(s); and (iv) an oxygen blocking or barrier layer. After HT, the protective film may be entirely or partially removed. Other embodiments relate to the pre-HT coated article, or the post-HT coated article.