Invention Grant
US09275828B2 Source for selectively providing positively or negatively charged particles for a focusing column
有权
用于选择性地提供用于聚焦柱的带正电或带负电荷的颗粒的源
- Patent Title: Source for selectively providing positively or negatively charged particles for a focusing column
- Patent Title (中): 用于选择性地提供用于聚焦柱的带正电或带负电荷的颗粒的源
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Application No.: US14271298Application Date: 2014-05-06
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Publication No.: US09275828B2Publication Date: 2016-03-01
- Inventor: Brian Roberts Routh, Jr.
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg; Nathan H. Calvert
- Main IPC: H01J49/04
- IPC: H01J49/04 ; H01J49/10 ; H01J37/20 ; H01J37/26 ; H01J27/16 ; H01J37/05 ; H01J37/077 ; H01J37/08 ; H01J37/304 ; H01J37/305 ; G01T1/28 ; H01J37/30
Abstract:
A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.
Public/Granted literature
- US20140326877A1 Source for Selectively Providing Positively or Negatively Charged Particles for a Focusing Column Public/Granted day:2014-11-06
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