Invention Grant
- Patent Title: Hybrid electron microscope
- Patent Title (中): 混合电子显微镜
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Application No.: US14827666Application Date: 2015-08-17
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Publication No.: US09431211B2Publication Date: 2016-08-30
- Inventor: Renu Sharma , Stefano Mazzucco
- Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
- Applicant Address: US DC Washington US MD College Park
- Assignee: THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE,UNIVERSITY OF MARYLAND, COLLEGE PARK
- Current Assignee: THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE,UNIVERSITY OF MARYLAND, COLLEGE PARK
- Current Assignee Address: US DC Washington US MD College Park
- Agent Toby D. Hain
- Main IPC: H01J37/28
- IPC: H01J37/28 ; G01N21/64 ; H01J37/22 ; H01J37/20 ; H01J37/26

Abstract:
A hybrid electron microscope includes: an electron source to emit an electron beam; a parabolic mirror including: a reflective surface; and an aperture to communicate the electron beam through the parabolic mirror; and a sample holder interposed between the electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder. A process for acquiring hybrid electron microscopy data includes: disposing a parabolic mirror in a chamber, the parabolic mirror including: a reflective surface; and an aperture to communicate an electron beam through the parabolic mirror; disposing a sample on a sample holder; interposing a sample holder between an electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder; producing the electron beam from the electron source; subjecting the sample to the electron beam; communicating the electron beam through the sample and the aperture of the parabolic mirror; and collecting imaging data of the sample in response to the subjecting the sample to the electron beam to acquire the hybrid electron microscopy data.
Public/Granted literature
- US20160027609A1 HYBRID ELECTRON MICROSCOPE Public/Granted day:2016-01-28
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