公开(公告)号：US09431211B2

公开(公告)日：2016-08-30

申请号：US14827666

申请日：2015-08-17

Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Inventor： Renu Sharma ,  Stefano Mazzucco

IPC: H01J37/28 ,  G01N21/64 ,  H01J37/22 ,  H01J37/20 ,  H01J37/26

CPC classification number: H01J37/226 ,  H01J37/20 ,  H01J37/244 ,  H01J37/261 ,  H01J2237/063 ,  H01J2237/2007 ,  H01J2237/2445 ,  H01J2237/2602

Abstract: A hybrid electron microscope includes: an electron source to emit an electron beam; a parabolic mirror including: a reflective surface; and an aperture to communicate the electron beam through the parabolic mirror; and a sample holder interposed between the electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder. A process for acquiring hybrid electron microscopy data includes: disposing a parabolic mirror in a chamber, the parabolic mirror including: a reflective surface; and an aperture to communicate an electron beam through the parabolic mirror; disposing a sample on a sample holder; interposing a sample holder between an electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder; producing the electron beam from the electron source; subjecting the sample to the electron beam; communicating the electron beam through the sample and the aperture of the parabolic mirror; and collecting imaging data of the sample in response to the subjecting the sample to the electron beam to acquire the hybrid electron microscopy data.

Abstract translation: 混合电子显微镜包括：发射电子束的电子源; 抛物面镜包括：反射面; 以及使电子束通过抛物面反射镜传播的孔; 以及插入在电子源和抛物面反射镜之间的样品保持架，使得抛物面镜的反射表面面向电子源和样品保持器。 一种用于获取混合电子显微镜数据的方法包括：在室中设置抛物面镜，所述抛物面镜包括：反射表面; 以及用于将电子束通过抛物面反射镜传播的孔; 将样品放在样品架上; 在电子源和抛物面反射镜之间插入样品架，使得抛物面镜的反射面朝向电子源和样品架; 从电子源产生电子束; 使样品经受电子束; 将电子束通过样品和抛物面镜的孔传播; 以及响应于将样品经受电子束来采集样品的成像数据以获得混合电子显微镜数据。

公开(公告)号：US20160027609A1

公开(公告)日：2016-01-28

申请号：US14827666

申请日：2015-08-17

Applicant: Stefano Mazzucco ,  NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Inventor： Renu Sharma ,  Stefano Mazzucco

IPC: H01J37/22 ,  H01J37/26 ,  H01J37/20

CPC classification number: H01J37/226 ,  H01J37/20 ,  H01J37/244 ,  H01J37/261 ,  H01J2237/063 ,  H01J2237/2007 ,  H01J2237/2445 ,  H01J2237/2602

Abstract: A hybrid electron microscope includes: an electron source to emit an electron beam; a parabolic mirror including: a reflective surface; and an aperture to communicate the electron beam through the parabolic mirror; and a sample holder interposed between the electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder. A process for acquiring hybrid electron microscopy data includes: disposing a parabolic mirror in a chamber, the parabolic mirror including: a reflective surface; and an aperture to communicate an electron beam through the parabolic mirror; disposing a sample on a sample holder; interposing a sample holder between an electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder; producing the electron beam from the electron source; subjecting the sample to the electron beam; communicating the electron beam through the sample and the aperture of the parabolic mirror; and collecting imaging data of the sample in response to the subjecting the sample to the electron beam to acquire the hybrid electron microscopy data.

Abstract translation: 混合电子显微镜包括：发射电子束的电子源; 抛物面镜包括：反射面; 以及使电子束通过抛物面反射镜传播的孔; 以及插入在电子源和抛物面反射镜之间的样品保持器，使得抛物面镜的反射表面面向电子源和样品保持器。 一种用于获取混合电子显微镜数据的方法包括：在室中设置抛物面镜，所述抛物面镜包括：反射表面; 以及用于将电子束通过抛物面反射镜传播的孔; 将样品放在样品架上; 在电子源和抛物面反射镜之间插入样品架，使得抛物面镜的反射面朝向电子源和样品架; 从电子源产生电子束; 使样品经受电子束; 将电子束通过样品和抛物面镜的孔传播; 以及响应于将样品经受电子束来采集样品的成像数据以获得混合电子显微镜数据。