Invention Grant
- Patent Title: Circuit tracing using a focused ion beam
- Patent Title (中): 使用聚焦离子束的电路跟踪
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Application No.: US14811549Application Date: 2015-07-28
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Publication No.: US09529040B2Publication Date: 2016-12-27
- Inventor: Christopher Pawlowicz , Alexander Sorkin , Alexander Krechmer
- Applicant: TECHINSIGHTS INC.
- Applicant Address: CA Ottawa, Ontario
- Assignee: TECHINSIGHTS INC.
- Current Assignee: TECHINSIGHTS INC.
- Current Assignee Address: CA Ottawa, Ontario
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: G21G5/00
- IPC: G21G5/00 ; G01R31/303 ; G01R31/28 ; G01N23/225 ; H01L21/66

Abstract:
Described are various embodiments of methods and systems for tracing circuitry on integrated circuits using focused ion beam based imaging techniques. In one such embodiment, a method is provide for identifying functional componentry associated with a switchable power interface on an integrated circuit, wherein the switchable power interface comprises a source and a drain with a control switch therebetween, said control switch being controllable by a control signal during operation of the integrated circuit. The method comprises connecting, with deposited conductive material, the source and the drain; applying an external voltage bias to a power input of the switchable power interface via one of the source and the drain; exposing the integrated circuit to a focused ion beam; and gathering an image of the integrated circuit during exposure to determine areas of high contrast indicating functional componentry in operative connection with the switchable power interface.
Public/Granted literature
- US20160187419A1 CIRCUIT TRACING USING A FOCUSED ION BEAM Public/Granted day:2016-06-30
Information query
IPC分类:
G | 物理 |
G21 | 核物理;核工程 |
G21G | 化学元素的转变;放射源 |
G21G5/00 | 通过化学反应进行化学元素的推断转变 |