Invention Grant
- Patent Title: Inspection device with vertically moveable assembly
- Patent Title (中): 具有垂直移动组件的检查装置
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Application No.: US14282565Application Date: 2014-05-20
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Publication No.: US09535089B2Publication Date: 2017-01-03
- Inventor: Gary Mark Gunderson , Greg Olmstead
- Applicant: RUDOLPH TECHNOLOGIES, INC.
- Applicant Address: US MA Wilmington
- Assignee: Rudolph Technologies, Inc.
- Current Assignee: Rudolph Technologies, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Dicke Billig & Czaja, PLLC
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R1/04 ; G01R31/28

Abstract:
The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.
Public/Granted literature
- US20140253166A1 INSPECTION DEVICE WITH VERTICALLY MOVEABLE ASSEMBLY Public/Granted day:2014-09-11
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