Invention Grant
- Patent Title: Coating apparatus including nozzle cleaning mechanism and method of forming coating layer using the same
- Patent Title (中): 包括喷嘴清洁机构和使用其的涂层形成方法的涂布装置
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Application No.: US12980531Application Date: 2010-12-29
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Publication No.: US09561521B2Publication Date: 2017-02-07
- Inventor: Tae-Kyun Jeong , Kyong-Deuk Jeong , Jong-Ik Park , Myung-Shik Kim , Hyoung-Won Kim , Dong-Ki Shin , Jeong-Hak Choi
- Applicant: Tae-Kyun Jeong , Kyong-Deuk Jeong , Jong-Ik Park , Myung-Shik Kim , Hyoung-Won Kim , Dong-Ki Shin , Jeong-Hak Choi
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Morgan, Lewis & Bockius LLP
- Priority: KR10-2010-0105626 20101027
- Main IPC: B05C3/10
- IPC: B05C3/10 ; B05B15/02 ; B05B15/10 ; B05D1/26 ; C03C17/00 ; G03F7/16 ; B05C3/09 ; B05C11/11 ; H01L21/67 ; B41J2/165 ; B05D1/00 ; G11B7/26 ; B05D1/02

Abstract:
A coating apparatus includes: a nozzle having a nozzle front end configured to spray a coating solution and a head configured to store the coating solution; a movement axis configured to cause the nozzle to move back and forth in a straight line; a rotating connection member configured to connect the movement axis with the nozzle and allow the nozzle to rotate; a stage disposed under the movement axis; and a cleaning means disposed at an end of the movement axis, and having a nozzle front end insertion unit in a concave shape of the nozzle front end and a base fixing the insertion unit, wherein the nozzle is fixed in a normal direction of a surface of the stage by the movement axis, moves back and forth in an extension direction of the movement axis, and rotates with respect to the movement axis.
Public/Granted literature
- US20120107514A1 COATING APPARATUS AND METHOD OF FORMING COATING LAYER USING THE SAME Public/Granted day:2012-05-03
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