Invention Grant
- Patent Title: Graphene structure, method for producing the same, electronic device element and electronic device
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Application No.: US12643434Application Date: 2009-12-21
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Publication No.: US09607725B2Publication Date: 2017-03-28
- Inventor: Adarsh Sandhu
- Applicant: Adarsh Sandhu
- Applicant Address: US DE Wilmington
- Assignee: EMPIRE TECHNOLOGY DEVELOPMENT LLC
- Current Assignee: EMPIRE TECHNOLOGY DEVELOPMENT LLC
- Current Assignee Address: US DE Wilmington
- Agency: Maschoff Brennan
- Priority: JP2009-281897 20091211
- Main IPC: B05D3/10
- IPC: B05D3/10 ; B05D1/36 ; B32B3/10 ; B32B9/00 ; B05D5/12 ; B05D3/04 ; B05D5/00 ; H01B1/04 ; B82Y30/00 ; B82Y40/00 ; C01B31/04 ; H01L31/0224 ; H01L31/18

Abstract:
Provided are a graphene structure and a method for producing the same in which graphene can be patterned with high precision, and thereby microfabrication of electronic device elements and electronic devices using graphene is possible and the manufacturing cost can be notably reduced. A resist film is precisely patterned on a substrate, hydrophilized films are formed in openings of the resist film, and then GO is selectively fixed on the portions of the hydrophilized films by a chemical bond utilizing the hydrophilicity of the GO, and the GO is reduced to obtain a graphene structure in which graphene is selectively fixed to only the portions of the hydrophilized films. Thus, the graphene structure is constituted by disposing graphene on a substrate and forming a bond, by hydrophilization treatment, between the hydrophilized portion of the substrate and the graphene and/or between the unhydrophobized portion of the substrate and the graphene.
Public/Granted literature
- US20110143101A1 GRAPHENE STRUCTURE, METHOD FOR PRODUCING THE SAME, ELECTRONIC DEVICE ELEMENT AND ELECTRONIC DEVICE Public/Granted day:2011-06-16
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