Invention Grant
- Patent Title: Combined multipole magnet and dipole scanning magnet
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Application No.: US14978776Application Date: 2015-12-22
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Publication No.: US09620327B2Publication Date: 2017-04-11
- Inventor: Edward C. Eisner
- Applicant: Axcelis Technologies, Inc.
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/141 ; H01J37/08 ; H01J37/317 ; H01J37/147

Abstract:
A combined scanning and focusing magnet for an ion implantation system is provided. The combined scanning and focusing magnet has a yoke having a high magnetic permeability. The yoke defines a hole configured to pass an ion beam therethrough. One or more scanner coils operably are coupled to the yoke and configured to generate a time-varying predominantly dipole magnetic field when electrically coupled to a power supply. One or more focusing coils are operably coupled to the yoke and configured to generate a predominantly multipole magnetic field, wherein the predominantly multipole magnetic field is one of static or time-varying.
Public/Granted literature
- US20160189913A1 Combined Multipole Magnet and Dipole Scanning Magnet Public/Granted day:2016-06-30
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