Invention Grant
- Patent Title: Method and device for measuring large-area and massive scattered field in nanoscale
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Application No.: US14754759Application Date: 2015-06-30
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Publication No.: US09785047B2Publication Date: 2017-10-10
- Inventor: Shiyuan Liu , Weichao Du , Chuanwei Zhang , Yinyin Tan
- Applicant: Huazhong University of Science and Technology
- Applicant Address: CN Wuhan
- Assignee: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: CN Wuhan
- Agency: Matthias Scholl, PC
- Agent Matthias Scholl
- Priority: CN201410855944 20141231
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G01B11/06 ; G01B11/24 ; G01N21/21

Abstract:
A device for measuring a large-area and massive scattered field in nanoscale. The device includes a polarization state generator disposed on an output optical path of a laser source, a polarization state analyzer operating to demodulate a polarized light beam emitted thereon, a first objective lens and a first lens disposed on an optical path of a sample stage, and a scanning mirror disposed on an optical path in front of or at the rear of the polarization state generator.
Public/Granted literature
- US20160187248A1 METHOD AND DEVICE FOR MEASURING LARGE-AREA AND MASSIVE SCATTERED FIELD IN NANOSCALE Public/Granted day:2016-06-30
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