Invention Grant
- Patent Title: Electron emitter device with integrated multi-pole electrode structure
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Application No.: US14485588Application Date: 2014-09-12
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Publication No.: US09793089B2Publication Date: 2017-10-17
- Inventor: Thomas Plettner , Mehran Nasser-Ghodsi
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: JDI Patent
- Agent Joshua D. Isenberg
- Main IPC: H01J1/304
- IPC: H01J1/304 ; H01J37/153 ; H01J37/073 ; H01J37/28 ; H01J37/285 ; H01J37/147 ; B82Y15/00 ; B82Y40/00 ; H01J9/02

Abstract:
A field emission device comprises one or more emitter elements, each having a high aspect ratio structure with a nanometer scaled cross section; and one or more segmented electrodes, each surrounding one of the one or more emitters. Each of the one or more segmented electrodes has multiple electrode plates. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
Public/Granted literature
- US20150076988A1 ELECTRON EMITTER DEVICE WITH INTEGRATED MULTI-POLE ELECTRODE STRUCTURE Public/Granted day:2015-03-19
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