Invention Grant
- Patent Title: Undercoat agent and method of forming pattern of layer containing block copolymer
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Application No.: US15156170Application Date: 2016-05-16
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Publication No.: US09834696B2Publication Date: 2017-12-05
- Inventor: Takahiro Senzaki , Ken Miyagi , Tsuyoshi Kurosawa , Daiju Shiono , Tasuku Matsumiya , Kenichiro Miyashita , Katsumi Ohmori
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2012-057693 20120314; JP2013-020932 20130205
- Main IPC: B05D3/02
- IPC: B05D3/02 ; B05D3/06 ; C09D125/14 ; C09D143/04 ; C09D133/02 ; C09D133/22 ; C09D133/08 ; C09D135/06 ; C09D133/18 ; C09J133/06 ; C09J133/14 ; B05D3/14 ; B05D7/00 ; C09D125/02

Abstract:
An undercoat agent including a block copolymer having a plurality of blocks bonded formed on a substrate. The undercoat agent contains a resin component that includes a structural unit having an aromatic ring and a structural unit having no aromatic ring, and the resin component includes a group which can interact with the substrate and does not include a 3 to 7-membered, ether-containing cyclic group; and a method of forming a pattern of a layer containing a block copolymer. The method includes applying an undercoat agent to a substrate to form a layer containing the undercoat agent; forming a layer containing a block copolymer having multiple blocks bonded on a surface of the layer containing the undercoat agent, followed by a phase separation of the layer containing the block copolymer; and selectively removing a phase containing at least one block of multiple blocks constituting the block copolymer.
Public/Granted literature
- US20160257838A1 UNDERCOAT AGENT AND METHOD OF FORMING PATTERN OF LAYER CONTAINING BLOCK COPOLYMER Public/Granted day:2016-09-08
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